Manufacturing method of MoSi2-SiC nanocomposite coating
    1.
    发明授权
    Manufacturing method of MoSi2-SiC nanocomposite coating 有权
    MoSi2-SiC纳米复合涂层的制备方法

    公开(公告)号:US07179505B2

    公开(公告)日:2007-02-20

    申请号:US11023428

    申请日:2004-12-29

    IPC分类号: C23C16/32 C23C16/42

    CPC分类号: C23C16/32 C23C16/30

    摘要: The embodiments of the invention relate to a MoSi2-SiC nanocomposite coating layer formed on surfaces of refractory metals such as Mo, Nb, Ta, W and their alloys. The MoSi2-SiC nanocomposite coating layer is manufactured by forming a molybdenum carbide (MoC and MoC2) coating layers on the surfaces of the substrates at high temperature, and the subsequent vapor-deposition of Si. The MoSi2-SiC nanocomposite coating layer has a microstructure in which SiC particles are mostly located on the equiaxed MoSi2 grain boundary. The MoSi2-SiC nanocomposite coating layer can have a close thermal expansion coefficient to that of the substrate by controlling a volume fraction of SiC particles exisiting in the nanocomposite coating. As a result, the generation of cracks due to the mismatch in the thermal expansion coefficients between the substrate and the nanocomposite coating layer is suppressed and the high-temperature repeated thermal cyclic oxidation resistance and the low-temperature oxidation resistance of the coated substrate are improved.

    摘要翻译: 本发明的实施方案涉及在难熔金属如Mo,Nb,Ta,W及其合金的表面上形成的MoSi 2 -SiC纳米复合物涂层。 通过在高温下在基板的表面上形成碳化钼(MoC和MoC 2 N 2)涂层来制造MoSi 2 -SiC纳米复合材料涂层,随后 Si的气相沉积。 MoSi 2 -SiC纳米复合涂层具有其中SiC颗粒主要位于等轴MoSi 2晶界的微结构。 通过控制在纳米复合涂层中存在的SiC颗粒的体积分数,MoSi 2 -SiC纳米复合物涂层可以具有与基板的热膨胀系数相近的热膨胀系数。 结果,抑制了由于基板和纳米复合涂层之间的热膨胀系数不一致引起的裂纹的产生,并且改善了涂覆基板的高温重复热循环抗氧化性和低温抗氧化性 。

    NbSi-2 base nanocomposite coating and manufacturing method thereof
    2.
    发明申请
    NbSi-2 base nanocomposite coating and manufacturing method thereof 审中-公开
    NbSi-2基复合纳米复合涂层及其制备方法

    公开(公告)号:US20060029830A1

    公开(公告)日:2006-02-09

    申请号:US11023463

    申请日:2004-12-29

    IPC分类号: B32B19/00 B32B9/00 C23C16/26

    摘要: A NbSi2-base nanocomposite coating formed on the surface of niobium or niobium-base alloys is disclosed. The nanocomposite coating layer is manufactured by forming a niobium carbide layers or a niobium nitride layers by depositing of carbon or nitrogen on the surface, and then depositing silicon. The nanocomposite coating layer has a microstructure that SiC or Si3N4 particles are mostly precipitated on an equiaxed NbSi2 grain boundary. The thermal expansion coefficients of NbSi2-base nanocomposite coating layers become close to that of the substrates by adjusting the volume fraction of SiC or Si3N4 particles in the nanocomposite coating layers. Accordingly, the generation of cracks caused by thermal stress due to the mismatch in thermal expansion coefficient between the NbSi2-base nanocomposite coatings and the substrates can be suppressed, thereby improving the high-temperature oxidation resistance in the repeated thermal cycling use of the NbSi2-base nanocomposite coated substrates. Further, the increase in the volume fraction of dense SiO2 oxide phase formed on the surface of the NbSi2-base nanocomposite coating layers improves also high-temperature isothermal oxidation resistance.

    摘要翻译: 公开了在铌或铌基合金的表面上形成的NbSi 2 N基纳米复合涂层。 通过在表面上沉积碳或氮,然后沉积硅来形成碳化铌层或氮化铌层来制造纳米复合涂层。 纳米复合涂层具有微观结构,SiC或Si 3 N 4+颗粒主要在等轴NbSi 2晶界上沉淀。 通过调节SiC或Si 3 N 4纳米复合材料层的体积分数,NbSi 2 N基纳米复合材料涂层的热膨胀系数变得接近于基底的热膨胀系数, SUB>颗粒在纳米复合涂层中。 因此,可以抑制由于NbSi 2+基纳米复合材料层和基板之间的热膨胀系数的失配而引起的热应力的产生,从而提高了NbSi 2 重复热循环使用NbSi 2 N基纳米复合物涂覆的基材。 此外,形成在NbSi 2 N基纳米复合涂层表面上的致密SiO 2氧化物相的体积分数的增加也提高了高温等温抗氧化性。

    MoSi2-SiC nanocomposite coating, and manufacturing method thereof
    3.
    发明申请
    MoSi2-SiC nanocomposite coating, and manufacturing method thereof 有权
    MoSi2-SiC纳米复合涂层及其制造方法

    公开(公告)号:US20060003567A1

    公开(公告)日:2006-01-05

    申请号:US11023428

    申请日:2004-12-29

    IPC分类号: H01L21/28 H01L21/3205

    CPC分类号: C23C16/32 C23C16/30

    摘要: Disclosed are the MoSi2—SiC nanocomposite coating layer formed on surfaces of refractory metals such as Mo, Nb, Ta, W and their alloys. The MoSi2—SiC nanocomposite coating layer is manufactured by forming a molybdenum carbide (MoC and MoC2) coating layers on the surfaces of the substrates at high temperature, and the subsequent vapor-deposition of Si. The MoSi2—SiC nanocomposite coating layer has a microstructure in which SiC particles are mostly located on the equiaxed MoSi2 grain boundary. The MoSi2—SiC nanocomposite coating layer can have a close thermal expansion coefficient to that of the substrate by controlling a volume fraction of SiC particles exisiting in the nanocomposite coating. As a result, the generation of cracks due to the mismatch in the thermal expansion coefficients between the substrate and the nanocomposite coating layer is suppressed and the high-temperature repeated thermal cyclic oxidation resistance and the low-temperature oxidation resistance of the coated substrate are improved.

    摘要翻译: 公开了形成在难熔金属如Mo,Nb,Ta,W及其合金的表面上的MoSi 2 -SiC纳米复合物涂层。 通过在高温下在基板的表面上形成碳化钼(MoC和MoC 2 N 2)涂层来制造MoSi 2 -SiC纳米复合材料涂层,随后 Si的气相沉积。 MoSi 2 -SiC纳米复合涂层具有其中SiC颗粒主要位于等轴MoSi 2晶界的微结构。 通过控制在纳米复合涂层中存在的SiC颗粒的体积分数,MoSi 2 -SiC纳米复合物涂层可以具有与基板的热膨胀系数相近的热膨胀系数。 结果,抑制了由于基板和纳米复合涂层之间的热膨胀系数不一致引起的裂纹的产生,并且改善了涂覆基板的高温重复热循环抗氧化性和低温抗氧化性 。