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公开(公告)号：US5972307A
公开(公告)日：1999-10-26
申请号：US898376
申请日：1997-07-22
申请人： Joan Carvalho , Alan D. Watson , Jere D. Fellmann , Michael Koo
发明人： Joan Carvalho , Alan D. Watson , Jere D. Fellmann , Michael Koo
IPC分类号： A61K49/00 , A61K49/06 , C07C237/06 , C07C237/10 , C07C237/12 , C07D241/06 , C07D257/02 , C07D295/185 , C07D403/14 , C07F9/6524 , C07F19/00 , A61K51/04 , A61B5/055 , C07D225/00 , C07F5/00
CPC分类号： C07D241/06 , A61K49/0002 , A61K49/06 , C07C237/06 , C07C237/10 , C07C237/12 , C07D257/02 , C07D295/185 , C07D403/14 , C07F19/005 , C07F9/6524
摘要： This invention relates to dichelants, in particular compounds having two macrocyclic chelant groups linked by a bridge containing an ester or amide bond, especially compounds of formula Vb ##STR1## (wherein each X which may be the same or different is NZ, O or S, at least two Xs being NZ;each Z is a group R.sup.1 or a group CR.sup.1.sub.2 Y, at least one Z, and preferably 2 or 3 Zs, on each macrocyclic ring being a group CR.sup.1.sub.2 Y;each Y is a group CO.sub.2 H, PO.sub.3 H, SO.sub.3 H, CONR.sup.1.sub.2, CON(OR.sup.1)R.sup.1, CNS or CONR.sup.1 NR.sup.1.sub.2, preferably COOH;m is 0 or 1 or 2, preferably 1; each n is 2 or 3, preferably 2; q is 1 or 2, preferably 1;each R.sup.1 which may be the same or different is a hydrogen atom or an alkyl group optionally substituted by one or more hydroxy and/or alkoxy groups;and D is a bridging group having a molecular weight of less than 1000, preferably less than 500, joining two macrocyclic rings via at least one amide or ester bond) and salts and metal chelates thereof.
摘要翻译： 本发明涉及双耳，特别是具有通过含有酯或酰胺键的桥连接的两个大环螯合剂基团的化合物，特别是式Vb化合物（其中每个X可以相同或不同，为至少NZ，O或S，至少 两个X为NZ;每个Z为基团R 1或基团CR 12 Y，至少一个Z，优选2或3个Z，每个大环上为基团CR 12Y;每个Y为CO 2 H，PO 3 H，SO 3 H，CONR 12， CON（OR1）R1，CNS或CONR1NR12，优选COOH; m为0或1或2，优选1;每个n为2或3，优选2; q为1或2，优选1;每个R 1可以相同 或不同的是氢原子或任选被一个或多个羟基和/或烷氧基取代的烷基; D是分子量小于1000，优选小于500的桥连基团，至少通过至少连接两个大环 一个酰胺或酯键）及其盐和金属螯合物。
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公开(公告)号：US08676375B2
公开(公告)日：2014-03-18
申请号：US13406076
申请日：2012-02-27
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/67276 , H01L21/6838
摘要： An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
摘要翻译： 一种自动盒式磁带盒式基板处理系统，包括：盒式存储模块，用于在处理之前和之后将多个基板存储在盒中。 衬底载体存储模块存储多个衬底载体。 衬底载体装载/卸载模块将衬底从盒存储模块加载到多个衬底载体上，并将衬底从多个衬底载体卸载到盒存储模块。 传送机构将多个基板传送到盒存储模块和多个基板载体之间，并将多个基板载体传送到基板载体装载/卸载模块和处理室之间。 视觉系统识别对应于衬底载体中的空衬底位置的多个衬底载体中的凹部。 处理器从视觉系统接收数据并且指示传送机构响应于所接收的数据将衬底传送到衬底载体上的位置。
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公开(公告)号：US20130226335A1
公开(公告)日：2013-08-29
申请号：US13406076
申请日：2012-02-27
IPC分类号： H01L21/677 , G05D3/00
CPC分类号： H01L21/681 , H01L21/67259 , H01L21/67276 , H01L21/6838
摘要： An automated cassette-to-cassette substrate handling system includes a cassette storage module for storing a plurality of substrates in cassettes before and after processing. A substrate carrier storage module stores a plurality of substrate carriers. A substrate carrier loading/unloading module loads substrates from the cassette storage module onto the plurality of substrate carriers and unloads substrates from the plurality of substrate carriers to the cassette storage module. A transport mechanism transports the plurality of substrates between the cassette storage module and the plurality of substrate carriers and transports the plurality of substrate carriers between the substrate carrier loading/unloading module and a processing chamber. A vision system recognizes recesses in the plurality of substrate carriers corresponding to empty substrate positions in the substrate carrier. A processor receives data from the vision system and instructs the transport mechanism to transport substrates to positions on the substrate carrier in response to the received data.
摘要翻译： 一种自动盒式磁带盒式基板处理系统，包括：盒式存储模块，用于在处理之前和之后将多个基板存储在盒中。 衬底载体存储模块存储多个衬底载体。 衬底载体装载/卸载模块将衬底从盒存储模块加载到多个衬底载体上，并将衬底从多个衬底载体卸载到盒存储模块。 传送机构将多个基板传送到盒存储模块和多个基板载体之间，并将多个基板载体传送到基板载体装载/卸载模块和处理室之间。 视觉系统识别对应于衬底载体中的空衬底位置的多个衬底载体中的凹部。 处理器从视觉系统接收数据并且指示传送机构响应于所接收的数据将衬底传送到衬底载体上的位置。
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