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公开(公告)号：US08692339B2
公开(公告)日：2014-04-08
申请号：US12737521
申请日：2009-06-03
申请人： Jochen Reinmuth , Michael Saettler , Stefan Weiss , Arnim Hoechst
发明人： Jochen Reinmuth , Michael Saettler , Stefan Weiss , Arnim Hoechst
IPC分类号： H04R17/00
CPC分类号： H04R19/005 , B81B2201/0257 , B81B2203/0315 , B81B2203/0392 , B81C1/00047 , B81C1/00103 , H04R31/00
摘要： In a method for manufacturing a micromechanical component, a cavity is produced in the substrate from an opening at the rear of a monocrystalline semiconductor substrate. The etching process used for this purpose and the monocrystalline semiconductor substrate used are controlled in such a way that a largely rectangular cavity is formed.
摘要翻译： 在微机械部件的制造方法中，从单晶半导体基板的背面的开口在基板中产生空腔。 用于此目的的蚀刻工艺和所使用的单晶半导体衬底以这样的方式被控制，使得形成了大致矩形的空腔。
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公开(公告)号：US20110198713A1
公开(公告)日：2011-08-18
申请号：US12737521
申请日：2009-06-03
申请人： Jochen Reinmuth , Michael Saettler , Stefan Weiss , Arnim Hoechst
发明人： Jochen Reinmuth , Michael Saettler , Stefan Weiss , Arnim Hoechst
CPC分类号： H04R19/005 , B81B2201/0257 , B81B2203/0315 , B81B2203/0392 , B81C1/00047 , B81C1/00103 , H04R31/00
摘要： In a method for manufacturing a micromechanical component, a cavity is produced in the substrate from an opening at the rear of a monocrystalline semiconductor substrate. The etching process used for this purpose and the monocrystalline semiconductor substrate used are controlled in such a way that a largely rectangular cavity is formed.
摘要翻译： 在微机械部件的制造方法中，从单晶半导体基板的背面的开口在基板中产生空腔。 用于此目的的蚀刻工艺和所使用的单晶半导体衬底以这样的方式被控制，使得形成了大致矩形的空腔。
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3.发明授权Device for detecting and device for measuring the concentration of a substance 有权用于检测的装置和用于测量物质浓度的装置公开(公告)号：US07795586B2
公开(公告)日：2010-09-14
申请号：US10528181
申请日：2003-02-27
IPC分类号： G01J5/00
CPC分类号： G01J3/02 , G01J3/0256 , G01J3/26 , G01J5/10 , G01J5/602 , G01N21/3504 , G01N2021/3137 , G01N2021/3166 , G01N2021/317
摘要： A device for detecting radiation signals and a device for measuring the concentration of a substance are described, a first detector and a second detector being provided on a first chip, and a first filter and a second filter being provided on a second chip, the first chip and the second chip being connected to one another in hermetically sealed fashion.
摘要翻译： 描述了一种用于检测辐射信号的装置和用于测量物质浓度的装置，第一检测器和第二检测器设置在第一芯片上，第一滤波器和第二滤波器设置在第二芯片上，第一 芯片和第二芯片以气密密封的方式彼此连接。
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4.发明申请Device for detecting and device for measuring the concentration of a substance 有权用于检测的装置和用于测量物质浓度的装置公开(公告)号：US20070057187A1
公开(公告)日：2007-03-15
申请号：US10528181
申请日：2003-02-27
IPC分类号： G01J5/00
CPC分类号： G01J3/02 , G01J3/0256 , G01J3/26 , G01J5/10 , G01J5/602 , G01N21/3504 , G01N2021/3137 , G01N2021/3166 , G01N2021/317
摘要： A device for detecting radiation signals and a device for measuring the concentration of a substance are described, a first detector and a second detector being provided on a first chip, and a first filter and a second filter being provided on a second chip, the first chip and the second chip being connected to one another in hermetically sealed fashion.
摘要翻译： 描述了一种用于检测辐射信号的装置和用于测量物质浓度的装置，第一检测器和第二检测器设置在第一芯片上，第一滤波器和第二滤波器设置在第二芯片上，第一 芯片和第二芯片以气密密封的方式彼此连接。
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