公开(公告)号：US20060127029A1

公开(公告)日：2006-06-15

申请号：US11010769

申请日：2004-12-13

申请人： Pinyen Lin ,  Yao Wang ,  Jun Ma ,  Xueyuan Liu ,  Peter Gulvin ,  Kristine German ,  Joel Kubby

发明人： Pinyen Lin ,  Yao Wang ,  Jun Ma ,  Xueyuan Liu ,  Peter Gulvin ,  Kristine German ,  Joel Kubby

IPC分类号： G02B6/00

CPC分类号： G02B6/3508 ,  G02B6/266 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3594 ,  G02B6/3596

摘要： An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

摘要翻译： 改进的悬臂光束开关设计，提供可变光衰减器（VOA）的功能。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

公开(公告)号：US20050031288A1

公开(公告)日：2005-02-10

申请号：US10634941

申请日：2003-08-05

申请人： Joel Kubby ,  Jun Ma ,  Kristine German ,  Peter Gulvin ,  Pinyen Lin

发明人： Joel Kubby ,  Jun Ma ,  Kristine German ,  Peter Gulvin ,  Pinyen Lin

IPC分类号： B81B3/00 ,  G02B6/35 ,  G02B6/36

CPC分类号： G02B6/3576 ,  B81B3/0018 ,  G02B6/3566 ,  G02B6/3584

摘要： A thermal actuator comprises a plurality of substantially straight and parallel beams arranged to form a beam array. The midpoint of each beam is attached or coupled to an orthogonal coupling beam. Each array beam has a beam heating parameter with a corresponding beam heating parameter value. The beam heating parameter values vary across the beam array based on a predetermined pattern. As the beams are heated by an included heating means, the distribution of beam temperatures in the beam array becomes asymmetric, thus causing the beam array to buckle. The buckling of the beams in the beam array, in turn, causes the attached coupling beam to move in a predetermined direction. The coupling beam motion, in turn, operates an included optical waveguide switch. The beams in the beam array are heated by any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.

摘要翻译： 热致动器包括布置成形成束阵列的多个基本上直的和平行的光束。 每个光束的中点附加或耦合到正交耦合光束。 每个阵列光束具有具有对应的光束加热参数值的光束加热参数。 光束加热参数值基于预定图案在波束阵列上变化。 当束被加热装置加热时，光束阵列中光束温度的分布变得不对称，从而使光束阵列发生弯曲。 光束阵列中的光束的弯曲又使连接的光束沿预定的方向移动。 耦合光束运动反过来操作包括的光波导开关。 光束阵列中的光束通过焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种加热。

公开(公告)号：US20060291794A1

公开(公告)日：2006-12-28

申请号：US11154019

申请日：2005-06-16

申请人： Xueyuan Liu ,  Peter Gulvin ,  Kristine German ,  Yao Wang ,  Jun Ma ,  Pinyen Lin ,  Joel Kubby ,  Kathleen Feinberg

发明人： Xueyuan Liu ,  Peter Gulvin ,  Kristine German ,  Yao Wang ,  Jun Ma ,  Pinyen Lin ,  Joel Kubby ,  Kathleen Feinberg

IPC分类号： G02B6/00

CPC分类号： G02B6/358 ,  G02B6/266 ,  G02B6/3508 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3594 ,  G02B6/3596

摘要： An improved waveguide shuttle optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a waveguide shuttle platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alternative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.

摘要翻译： 提供了可变光衰减器（VOA）的功能的改进的波导穿梭光开关设计。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准，可以实现单个设备，其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准波导穿梭平台的热驱动致动器相关联的闭锁机构。 开关功能和VOA功能的集成减少光损耗，否则当必须采用单独的开关和单独的VOA的不可避免的替代方案时，光损失是不可避免的。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。

公开(公告)号：US20050031253A1

公开(公告)日：2005-02-10

申请号：US10772693

申请日：2004-02-05

申请人： Jun Ma ,  Joel Kubby ,  Kristine German ,  Peter Gulvin ,  Pinyen Lin

发明人： Jun Ma ,  Joel Kubby ,  Kristine German ,  Peter Gulvin ,  Pinyen Lin

IPC分类号： B81B3/00 ,  G02B6/35 ,  G02B6/26

CPC分类号： B81B3/0018 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584

摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments with beam segment lengths. Each beam segment has a beam segment neutral axis, thus forming a corresponding plurality of beam segment neutral axes. The beam segment neutral axes are offset along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in the predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.

摘要翻译： 热致动器包括基本上直的梁。 光束具有光束长度和光束中点。 梁包括具有梁段长度的多个梁段。 每个光束段具有光束段中性轴线，从而形成相应的多个光束段中性轴线。 光束段中性轴基于预定图案沿光束长度偏移。 当束被加热装置加热时，光束弯曲。 光束的弯曲又使光束中点在预定方向上平移或移动。 光束中点运动依次运行附带的光波导开关。 加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

公开(公告)号：US20050031252A1

公开(公告)日：2005-02-10

申请号：US10772564

申请日：2004-02-05

申请人： Jun Ma ,  Joel Kubby ,  Kristine German ,  Peter Gulvin ,  Pinyen Lin

发明人： Jun Ma ,  Joel Kubby ,  Kristine German ,  Peter Gulvin ,  Pinyen Lin

IPC分类号： G02B26/02 ,  B81B3/00 ,  G02B6/35

CPC分类号： B81B3/0018 ,  G02B6/3566 ,  G02B6/3576 ,  G02B6/3584

摘要： A thermal actuator comprises a substantially straight beam. The beam has a beam length and a beam mid-point. The beam comprises a plurality of beam segments. Each beam segment has a beam segment width, the beam thus forming a corresponding plurality of beam segment widths. The beam segment widths vary along the beam length based on a predetermined pattern. As the beam is heated by an included heating means, the beam buckles. The buckling of the beam, in turn, causes the beam mid-point to translate or move in a predetermined direction. The beam mid-point movement, in turn, operates an included optical waveguide switch. The heating means comprises any of Joule heating, eddy current heating, conduction heating, convection heating and radiation heating.

摘要翻译： 热致动器包括基本上直的梁。 光束具有光束长度和光束中点。 梁包括多个梁段。 每个光束段具有光束段宽度，因此光束形成相应的多个光束段宽度。 光束段宽度基于预定图案沿着光束长度变化。 当束被加热装置加热时，光束弯曲。 光束的弯曲又使光束中点在预定方向上平移或移动。 光束中点运动依次运行附带的光波导开关。 加热装置包括焦耳加热，涡流加热，传导加热，对流加热和辐射加热中的任何一种。

公开(公告)号：US20050286850A1

公开(公告)日：2005-12-29

申请号：US10878834

申请日：2004-06-28

申请人： Kristine German ,  Peter Gulvin ,  Joel Kubby ,  Pinyen Lin ,  Xueyuan Liu ,  Yao Wang

发明人： Kristine German ,  Peter Gulvin ,  Joel Kubby ,  Pinyen Lin ,  Xueyuan Liu ,  Yao Wang

IPC分类号： G02B6/10 ,  G02B6/122

CPC分类号： G02B6/122 ,  G02B6/105

摘要： A waveguide structure has a base having a base height (h) above a substrate and a rectangular waveguide having a waveguide height (H) above the substrate and a waveguide width (W) between opposing sides of the waveguide.

摘要翻译： 波导结构具有在基板上方具有基底高度（h）的基部和在基板上方具有波导高度（H）的矩形波导和波导的相对侧之间的波导宽度（W）。

公开(公告)号：US20080002930A1

公开(公告)日：2008-01-03

申请号：US11734419

申请日：2007-04-12

申请人： Kristine German ,  Peter Gulvin ,  Joel Kubby

发明人： Kristine German ,  Peter Gulvin ,  Joel Kubby

IPC分类号： G02B6/42

CPC分类号： H01H1/0036 ,  G02B6/3566 ,  G02B6/3574 ,  G02B6/3576 ,  G02B6/358 ,  G02B6/3584 ,  H01H50/005 ,  H01H59/0009 ,  H01H2001/0042 ,  H01H2037/008 ,  H01H2061/006

摘要： A substantially straight beam in an unbuckled state is compressed to cause the beam to buckle using an adjustable compressor. The adjustable compressor applies force to one or both ends of the beam and limits compression on the beam to allow the beam to move between a first buckled state and a second buckled state. The first buckled state and the second buckled state comprise substantially equal magnitude and opposite direction buckling movements from the unbuckled state.

摘要翻译： 在无松开状态下的基本上直的梁被压缩以使得可以使用可调节的压缩机来使梁弯曲。 可调压缩机对梁的一端或两端施加力，并限制梁上的压缩，以允许梁在第一弯曲状态和第二弯曲状态之间移动。 第一弯曲状态和第二弯曲状态包括基本上相等的幅度和相对的方向从非卷曲状态的弯曲运动。

公开(公告)号：US20060034562A1

公开(公告)日：2006-02-16

申请号：US10918093

申请日：2004-08-13

申请人： Kristine German ,  Peter Gulvin ,  Joel Kubby

发明人： Kristine German ,  Peter Gulvin ,  Joel Kubby

IPC分类号： G02B6/42 ,  G02B6/26

CPC分类号： H01H1/0036 ,  G02B6/3566 ,  G02B6/3574 ,  G02B6/3576 ,  G02B6/358 ,  G02B6/3584 ,  H01H50/005 ,  H01H59/0009 ,  H01H2001/0042 ,  H01H2037/008 ,  H01H2061/006

摘要： A substantially straight beam in an unbuckled state is compressed to cause the beam to buckle using an adjustable compressor. The adjustable compressor applies force to one or both ends of the beam and limits compression on the beam to allow the beam to move between a first buckled state and a second buckled state. The first buckled state and the second buckled state comprise substantially equal magnitude and opposite direction buckling movements from the unbuckled state.

摘要翻译： 在无松开状态下的基本上直的梁被压缩以使得可以使用可调节的压缩机来使梁弯曲。 可调压缩机对梁的一端或两端施加力，并限制梁上的压缩，以允许梁在第一弯曲状态和第二弯曲状态之间移动。 第一弯曲状态和第二弯曲状态包括基本上相等的幅度和相对的方向从非卷曲状态的弯曲运动。

公开(公告)号：US20060110101A1

公开(公告)日：2006-05-25

申请号：US10995965

申请日：2004-11-23

申请人： Pinyen Lin ,  Joel Kubby ,  Yao Wang

发明人： Pinyen Lin ,  Joel Kubby ,  Yao Wang

IPC分类号： G02B6/26 ,  C03B37/022 ,  C03B37/16 ,  G02B6/42

CPC分类号： G02B6/3508 ,  G02B6/136 ,  G02B6/3544 ,  G02B6/356 ,  G02B6/3576 ,  G02B6/358 ,  G02B6/3584 ,  G02B6/3596 ,  G02B2006/12097

摘要： A method for forming a gap (16) of a width (d) which meets selected tolerance limits includes forming sidewalls (80, 82) in a microstructure, the sidewalls defining a gap (16) therebetween. The gap has a width defined between the sidewalls. The width of the gap between the sidewalls is determined. Where the determined width of the gap is below the selected tolerance limits for the width of the gap, the sidewalls are consumed to form a gap which meets the selected tolerance limits. The gap may be incorporated in a waveguide device (10) of a microswitch (100) and selectively connect input and output waveguides (130, 132).

摘要翻译： 用于形成宽度（d）的满足所选公差极限的间隙（16）的方法包括在微观结构中形成侧壁（80,82），所述侧壁在它们之间限定间隙（16）。 该间隙具有限定在侧壁之间的宽度。 确定侧壁之间的间隙的宽度。 在确定的间隙的宽度低于间隙宽度的所选公差极限的情况下，侧壁被消耗以形成满足所选公差极限的间隙。 该间隙可以结合在微动开关（100）的波导装置（10）中并选择性地连接输入和输出波导（130,132）。

公开(公告)号：US20050285902A1

公开(公告)日：2005-12-29

申请号：US10873125

申请日：2004-06-23

申请人： Peter Gulvin ,  Joel Kubby

发明人： Peter Gulvin ,  Joel Kubby

IPC分类号： B41J2/06 ,  B41J2/14

CPC分类号： B41J2/14314

摘要： An electrostatic actuator includes a segmented flexible membrane associated with individually addressable electrodes, one for each membrane segment. The electrodes are provided beneath a corresponding one of the membrane segments to define a plurality of actuator chambers between each of the electrodes and the corresponding membrane segment. Control electronics independently provide a bias voltage to select ones or all of the electrodes to generate an electrostatic field between any bias electrode and the corresponding membrane segment to attract the corresponding membrane segment toward the respective electrode. Upon elimination of the bias voltage, the corresponding membrane segments are elastically restored to their previous position. This structure can be incorporated into a fluid drop ejector to achieve variable drop size by control of the number of segments actuated. Additionally, by control of the time and space domain of the segment firing, the pressure pulse created by the fluid drop ejector can be precisely controlled.

摘要翻译： 静电致动器包括与单独可寻址电极相关联的分段柔性膜，每个膜片段一个。 电极设置在相应的一个膜段之下，以在每个电极和相应的膜段之间限定多个致动器室。 控制电子器件独立地提供偏置电压以选择一个或所有电极，以在任何偏置电极和相应的膜片段之间产生静电场，以将相应的膜段吸引到相应的电极。 在消除偏置电压时，相应的膜段被弹性恢复到其先前的位置。 这种结构可以被结合到流体液滴喷射器中，以通过控制致动段的数量来实现可变的液滴尺寸。 另外，通过控制段燃烧的时间和空间域，可以精确地控制由液滴喷射器产生的压力脉冲。