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    Substrate carrier
    2.
    发明申请
    Substrate carrier 有权
    基板载体

    公开(公告)号：US20050109668A1

    公开(公告)日：2005-05-26

    申请号：US10971714

    申请日：2004-10-22

    申请人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith ,  Michael Zabka

    发明人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith ,  Michael Zabka

    IPC分类号： B65D85/00 ,  H01L20060101

    CPC分类号： H01L21/67379 ,  H01L21/67383 ,  Y10S206/832 ,  Y10T16/469 ,  Y10T16/4707

    摘要： A carrier for transporting silicon semiconductor wafers during semiconductor wafer processing operations including an enclosure, a door and a flange structured to interface with a machine so that the carrier can be lifted by the machine. A lift saddle connects the flange to the container so that the load on the flange is transferred to a part of the enclosure other than the top of the enclosure to prevent distortion of the enclosure to maintaining seal integrity between the enclosure and the door.

    摘要翻译： 一种用于在半导体晶片处理操作期间传输硅半导体晶片的载体，包括壳体，门和与机器接合的凸缘和凸缘，使得载体能够被机器提升。 提升鞍座将法兰连接到容器，使得法兰上的负载被转移到外壳的除了外壳的顶部之外的一部分，以防止外壳变形，以保持外壳和门之间的密封完整性。

    Photochromic substrate container
    3.
    发明申请
    Photochromic substrate container 失效
    光致变色底物容器

    公开(公告)号：US20050139511A1

    公开(公告)日：2005-06-30

    申请号：US10971556

    申请日：2004-10-22

    申请人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    发明人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    IPC分类号： B65D79/02 ,  H01L21/673 ,  B65D85/30

    CPC分类号： H01L21/67288 ,  B65D79/02 ,  G03F1/66 ,  H01L21/67366

    摘要： A semiconductor wafer, substrate, or reticle storage or shipping device that includes a photochromic indicator of exposure to undesired electromagnetic radiation. The present invention includes the incorporation of a photochromic material into the plastic used to fabricate at least a portion of a semiconductor wafer, disk, or reticle shipping or storage containers. The container may include photochromic material in the form of a transparent window or a larger portion of the container. The photochromic material may change color or darkness in response to exposure to a selected range of wavelengths of light.

    摘要翻译： 包括暴露于不期望的电磁辐射的光致变色指示剂的半导体晶片，衬底或掩模版存储或运输装置。 本发明包括将光致变色材料结合到用于制造半导体晶片，盘或掩模版运输或存储容器的至少一部分的塑料中。 容器可以包括透明窗口形式的光致变色材料或容器的较大部分。 响应于暴露于所选择的光波长范围，光致变色材料可以改变颜色或黑暗。

    Wafer carrier door
    4.
    发明申请
    Wafer carrier door 有权
    晶圆架门

    公开(公告)号：US20050115591A1

    公开(公告)日：2005-06-02

    申请号：US10983107

    申请日：2004-11-05

    申请人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    发明人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    IPC分类号： B08B3/00 ,  B08B9/00 ,  H01L20060101

    CPC分类号： H01L21/67373 ,  H01L21/67386

    摘要： A wafer carrier door having an inner door portion and an outer door portion. The inner door portion has a substantially continuous inner surface. The outer door portion extends over at least a portion of the inner door portion. The outer door portion has a plurality of apertures formed therein. The outer door portion is attached to the inner door portion.

    摘要翻译： 具有内门部分和外门部分的晶片承载门。 内门部分具有基本连续的内表面。 外门部分在内门部分的至少一部分上延伸。 外门部分具有形成在其中的多个孔。 外门部分附接到内门部分。

    Substrate container
    5.
    发明申请
    Substrate container 失效
    基材容器

    公开(公告)号：US20050109669A1

    公开(公告)日：2005-05-26

    申请号：US10982401

    申请日：2004-11-05

    申请人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    发明人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    IPC分类号： A47G19/08 ,  B65D85/00 ,  H01L20060101 ,  H01L21/673

    CPC分类号： H01L21/67396

    摘要： A substrate carrier to dissipate electrostatic charge has a conductive grid or network overmolded in a substantially integral container. The grid is electrically connected to an underlying and grounded saddle. The carrier may further include substantially transparent side walls and electrically conductive shelves to retain stored substrates in a generally axial alignment.

    摘要翻译： 耗散静电电荷的衬底载体具有在基本上一体的容器中包覆模制的导电栅格或网络。 电网电连接到底层和接地的鞍座上。 载体还可以包括基本上透明的侧壁和导电架，以将所存储的基板保持在大致轴向对准。

    Wafer container and door with vibration dampening latching mechanism
    6.
    发明申请
    Wafer container and door with vibration dampening latching mechanism 有权
    晶圆容器和门具有减震锁定机构

    公开(公告)号：US20070108095A1

    公开(公告)日：2007-05-17

    申请号：US11651779

    申请日：2007-01-10

    申请人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    发明人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    IPC分类号： B65D85/00

    CPC分类号： H01L21/67373 ,  E05B17/0041 ,  E05B65/006 ,  E05B2015/0468 ,  E05B2015/0479 ,  E05C9/042

    摘要： A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.

    摘要翻译： 用于将多个晶片保持在轴向对准的大致平行间隔开的​​布置中的容器包括具有顶部，底部，一对相对侧面，后部和敞开前部的外壳部分。 在外壳中提供至少一个晶片支撑件以及在外壳的底部上的运动耦合。 容器具有用于密封地封闭敞开的前部的门，该门包括底盘和在底盘上的可操作的闩锁机构。 闩锁机构包括可选择地旋转的凸轮，以便在第一有利位置和第二偏好位置之间移动闩锁机构，以及至少一个振动阻尼器，用于抑制当锁定机构在第一和第二有利位置之间移动时产生的振动。

    Wafer container with secondary wafer restraint system
    7.
    发明申请
    Wafer container with secondary wafer restraint system 有权

    公开(公告)号：US20060108258A1

    公开(公告)日：2006-05-25

    申请号：US11284795

    申请日：2005-11-22

    申请人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    发明人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    IPC分类号： B65D85/00

    CPC分类号： H01L21/67369

    摘要： A wafer container providing improved wafer restraint during physical shock events. In embodiments of the invention, a secondary wafer restraint structure defining a plurality of notches is interposed between opposing wafer restraint members on the door of the container. The notches may be defined by one or more converging edges or surfaces meeting at a junction. The junctions are positioned so as to align with the wafer receiving portions of each opposing pair of wafer restraint member so that when the door is fully sealingly engaged with the enclosure of the container, the edge of the wafer is contacting the junction. In this position, any vertical movement of the wafer due to shock imparted to the container causes the wafer to contact the converging surfaces or edges, thereby limiting such movement. The positioning of the secondary wafer restraint structure between and proximate opposing fingers of the primary wafer restraint limits deflection of the wafer between support points and thereby further inhibits the wafer from “jumping” out of the supports and cross-slotting.

    Wafer container and door with cam latching mechanism
    8.
    发明申请
    Wafer container and door with cam latching mechanism 有权
    晶圆容器和门与凸轮锁定机构

    公开(公告)号：US20050127688A1

    公开(公告)日：2005-06-16

    申请号：US10988993

    申请日：2004-11-15

    申请人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    发明人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    IPC分类号： E05C3/04 ,  H01L20060101 ,  H01L21/673

    CPC分类号： H01L21/67353 ,  H01L21/67373 ,  Y10T292/1049

    摘要： A container for holding a single wafer includes a door with a latching mechanism having a cam with a pair of opposing wings extending laterally therefrom. The cam is selectively rotatably shiftable between a first favored position wherein the wings are completely within the door enclosure to enable the door to be engaged and disengaged from the door frame, and a second favored position wherein the wings extend laterally outward from the door enclosure so as to engage in the latch recesses in the door frame when the door is engaged in the door frame. The cam wings may include a ramped portion thereon for drawing the door into closer engagement in the door frame when the cam is rotated from the first favored position to the second favored position. Also, the latching mechanism may further include a spring disposed to provide a biasing force for urging the latching mechanism toward each of the first and second favored positions, and soft-stop dampening springs for decelerating the cam in a controlled fashion at the first and second favored positions and for absorbing vibrations resulting from the collision of the cam with a fixed stop on the door chassis.

    摘要翻译： 用于保持单个晶片的容器包括具有闩锁机构的门，所述闩锁机构具有凸轮，所述凸轮具有从其横向延伸的一对相对的翼。 凸轮可选择性地可旋转地在第一有利位置之间移动，其中翼完全在门外壳内，以使门能够与门框接合和脱离，以及第二优选位置，其中翼从门外壳横向向外延伸， 当门接合在门框中时，接合门框中的闩锁凹部。 凸轮翼可以包括其上的斜坡部分，用于当凸轮从第一有利位置旋转到第二优选位置时，将门拉近门框中更紧密的接合。 此外，闩锁机构还可以包括设置成提供用于将闩锁机构朝向第一和第二受惠位置中的每一个推动的偏置力的弹簧，以及用于在第一和第二位置以受控的方式减速凸轮的软停止润滑弹簧 有利的位置和吸收由于凸轮与门底盘上的固定挡块碰撞而产生的振动。

    Wafer container and door with vibration dampening latching mechanism
    9.
    发明申请
    Wafer container and door with vibration dampening latching mechanism 有权
    晶圆容器和门具有减震锁定机构

    公开(公告)号：US20050115867A1

    公开(公告)日：2005-06-02

    申请号：US10982402

    申请日：2004-11-05

    申请人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    发明人： John Burns ,  Matthew Fuller ,  Jeffery King ,  Martin Forbes ,  Mark Smith

    IPC分类号： B65D85/00 ,  E05B15/04 ,  E05B17/00 ,  E05B65/00 ,  E05C9/04 ,  F16F20060101 ,  H01L21/673

    CPC分类号： H01L21/67373 ,  E05B17/0041 ,  E05B65/006 ,  E05B2015/0468 ,  E05B2015/0479 ,  E05C9/042

    摘要： A container for holding a plurality of wafers in an axially aligned, generally parallel spaced apart arrangement includes an enclosure portion having a top, a bottom, a pair of opposing sides, a back and an open front. At least one wafer support is provided in the enclosure along with a kinematic coupling on the bottom of the enclosure. The container has a door for sealingly closing the open front which includes a chassis and an operable latching mechanism on the chassis. The latching mechanism includes a cam selectively rotatable to shift the latching mechanism between a first favored position and a second favored position and at least one vibration dampener for dampening vibrations generated when the latching mechanism is shifted between the first and second favored positions.

    摘要翻译： 用于将多个晶片保持在轴向对准的大致平行间隔开的​​布置中的容器包括具有顶部，底部，一对相对侧面，后部和敞开前部的外壳部分。 在外壳中提供至少一个晶片支撑件以及在外壳的底部上的运动耦合。 容器具有用于密封地封闭敞开的前部的门，该门包括底盘和在底盘上的可操作的闩锁机构。 闩锁机构包括可选择地旋转的凸轮，以便在第一有利位置和第二偏好位置之间移动闩锁机构，以及至少一个振动阻尼器，用于抑制当锁定机构在第一和第二有利位置之间移动时产生的振动。