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1.发明授权公开(公告)号：US07898049B2
公开(公告)日：2011-03-01
申请号：US11378020
申请日：2006-03-17
IPC分类号： H01L31/0232
CPC分类号： H01L27/14685 , H01L27/14627 , H01L31/02327
摘要： A structure and method for increasing the sensitivity of pixel sensors by eliminating a gap space formed between adjacent microlens structures in a pixel sensor array. Advantageously, exposure and flowing conditions are such that adjacent microlens structures touch (are webbed) at a horizontal cross-section, yet have a round lens shape in all directions. Particularly, exposure and flowing conditions are such that each touching microlens structure is formed to have a matched uniform radius of curvature at a horizontal cross-section and at a 45 degree cross-sections. To improve quality of mircrolens structure uniformity exhibited at all pixel locations including those near a pixel array edge or corner, a top anti-reflective coating layer is applied on top of a photoresist layer prior to the exposure and flowing steps.
摘要翻译： 通过消除在像素传感器阵列中相邻的微透镜结构之间形成的间隙空间来增加像素传感器的灵敏度的结构和方法。 有利地，曝光和流动条件使得相邻的微透镜结构以水平横截面接触（被蹼状），但在所有方向上具有圆形透镜形状。 特别地，曝光和流动条件使得每个触摸的微透镜结构形成为在水平横截面和45度横截面处具有匹配的均匀的曲率半径。 为了提高在包括像素阵列边缘或角落附近的像素位置的所有像素位置处显示的微电极结构均匀性的质量，在曝光和流动步骤之前，将顶部抗反射涂层施加在光致抗蚀剂层的顶部。
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公开(公告)号：US08181593B2
公开(公告)日：2012-05-22
申请号：US12103110
申请日：2008-04-15
IPC分类号： B05C5/02
CPC分类号： G03F7/091 , B05D1/005 , B05D3/002 , G03F7/11 , G03F7/162 , H01L21/6715 , Y10S134/902
摘要： An apparatus for applying a layer to a hydrophobic surface. The apparatus including: a chuck having a top surface and rotatable about a axis perpendicular to the top surface and passing through a center point of the top surface; and hollow first and second dispense nozzles having respective first and second bores, the first and second dispense nozzles mounted on a application head disposed above the top surface of the chuck, the application head moveable in a direction parallel to the top surface of the chuck, the first dispense nozzle alignable over the center point when the application head is in a first position and the second dispense nozzle alignable over the center point when the application head is in a second position, at least a portion of the bore of second dispense tube having a maximum cross-sectional dimension of between about 0.5 millimeters and about 2.0 millimeters.
摘要翻译： 一种用于将层施加到疏水表面的装置。 该装置包括：具有顶表面并可围绕垂直于顶表面并且穿过顶表面的中心点的轴线旋转的卡盘; 并且具有相应的第一和第二孔的中空的第一和第二分配喷嘴，所述第一和第二分配喷嘴安装在设置在所述卡盘的顶表面上方的施加头上，所述施加头可沿与所述卡盘的顶表面平行的方向移动， 当所述施加头处于第一位置时，所述第一分配喷嘴在所述中心点上可对准，并且所述第二分配喷嘴可在所述施加头处于第二位置时在所述中心点上对准，所述第二分配管的所述孔的至少一部分具有 最大横截面尺寸在约0.5毫米至约2.0毫米之间。
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公开(公告)号：US20080190361A1
公开(公告)日：2008-08-14
申请号：US12103110
申请日：2008-04-15
IPC分类号： B05C5/00
CPC分类号： G03F7/091 , B05D1/005 , B05D3/002 , G03F7/11 , G03F7/162 , H01L21/6715 , Y10S134/902
摘要： An apparatus for applying a layer to a hydrophobic surface. The apparatus including: a chuck having a top surface and rotatable about a axis perpendicular to the top surface and passing through a center point of the top surface; and hollow first and second dispense nozzles having respective first and second bores, the first and second dispense nozzles mounted on a application head disposed above the top surface of the chuck, the application head moveable in a direction parallel to the top surface of the chuck, the first dispense nozzle alignable over the center point when the application head is in a first position and the second dispense nozzle alignable over the center point when the application head is in a second position, at least a portion of the bore of second dispense tube having a maximum cross-sectional dimension of between about 0.5 millimeters and about 2.0 millimeters.
摘要翻译： 一种用于将层施加到疏水表面的装置。 该装置包括：具有顶表面并可围绕垂直于顶表面并且穿过顶表面的中心点的轴线旋转的卡盘; 并且具有相应的第一和第二孔的中空的第一和第二分配喷嘴，所述第一和第二分配喷嘴安装在设置在所述卡盘的顶表面上方的施加头上，所述施加头可沿与所述卡盘的顶表面平行的方向移动， 当所述施加头处于第一位置时，所述第一分配喷嘴在所述中心点上可对准，并且所述第二分配喷嘴可在所述施加头处于第二位置时在所述中心点上对准，所述第二分配管的所述孔的至少一部分具有 最大横截面尺寸在约0.5毫米至约2.0毫米之间。
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公开(公告)号：US07384878B2
公开(公告)日：2008-06-10
申请号：US11161214
申请日：2005-07-27
IPC分类号： H01L21/31 , H01L21/469
CPC分类号： G03F7/091 , B05D1/005 , B05D3/002 , G03F7/11 , G03F7/162 , H01L21/6715 , Y10S134/902
摘要： A method of forming a coating. The method includes: providing a substrate having a surface; forming a layer of water on the surface; and forming a layer of a material on the layer of water.
摘要翻译： 一种形成涂层的方法。 该方法包括：提供具有表面的基板; 在表面上形成一层水; 并在水层上形成一层材料。
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