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公开(公告)号:US6046487A
公开(公告)日:2000-04-04
申请号:US989303
申请日:1997-12-12
申请人: John Preston Benedict , David Mark Dobuzinsky , Philip Lee Flaitz , Erwin N. Hammerl , Herbert Ho , James F. Moseman , Herbert Palm , Seiko Yoshida , Hiroshi Takato
发明人: John Preston Benedict , David Mark Dobuzinsky , Philip Lee Flaitz , Erwin N. Hammerl , Herbert Ho , James F. Moseman , Herbert Palm , Seiko Yoshida , Hiroshi Takato
IPC分类号: H01L21/76 , H01L21/762 , H01L27/04
CPC分类号: H01L21/76232 , H01L21/762
摘要: Disclosed is an improved process and liner for trench isolation which includes either a single oxynitride layer or a dual oxynitride (or oxide)/nitride layer. Such a process and liner has an improved process window as well as being an effective O.sub.2 diffusion barrier and resistant to hot phosphoric and hydrofluoric acids.
摘要翻译: 公开了用于沟槽隔离的改进的工艺和衬垫,其包括单一氮氧化物层或双氮氧化物(或氧化物)/氮化物层。 这种工艺和衬里具有改进的工艺窗口,并且是有效的O 2扩散阻挡层并且耐热磷酸和氢氟酸。
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公开(公告)号:US5763315A
公开(公告)日:1998-06-09
申请号:US790266
申请日:1997-01-28
申请人: John Preston Benedict , David Mark Dobuzinsky , Philip Lee Flaitz , Erwin N. Hammerl , Herbert Ho , James F. Moseman , Herbert Palm , Seiko Yoshida , Hiroshi Takato
发明人: John Preston Benedict , David Mark Dobuzinsky , Philip Lee Flaitz , Erwin N. Hammerl , Herbert Ho , James F. Moseman , Herbert Palm , Seiko Yoshida , Hiroshi Takato
IPC分类号: H01L21/76 , H01L21/762
CPC分类号: H01L21/76232 , H01L21/762
摘要: Disclosed is an improved process and liner for trench isolation which includes either a single oxynitride layer or a dual oxynitride (or oxide)/nitride layer. Such a process and liner has an improved process window as well as being an effective O.sub.2 diffusion barrier and resistant to hot phosphoric and hydrofluoric acids.
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