Fiber optic system for remote fluorescent sensing using excitation and
return fibers
    3.
    发明授权
    Fiber optic system for remote fluorescent sensing using excitation and return fibers 失效
    用于使用激发和返回光纤进行远程荧光检测的光纤系统

    公开(公告)号:US5569911A

    公开(公告)日:1996-10-29

    申请号:US597318

    申请日:1996-02-06

    IPC分类号: G01D5/26 H01J5/16

    CPC分类号: G01D5/268

    摘要: A fiber optic probe system includes a fiber optic probe and a carrier cable coupled to the probe. The carrier cable includes an excitation fiber for receiving excitation light and supplying a portion of the excitation light to the fiber optic probe, a return fiber for receiving detected light from the probe, and a directional coupler coupling the excitation fiber with the return fiber. The directional coupler is situated near an end of the carrier cable which is closest to the probe. A plurality of these fiber optic probes can be multiplexed using a plurality of carrier cables, each cable having a respective excitation fiber for receiving excitation light and supplying the excitation light to a respective one of the plurality of fiber optic probes.

    摘要翻译: 光纤探针系统包括耦合到探针的光纤探针和载体电缆。 载体电缆包括用于接收激发光并将一部分激发光提供给光纤探针的激励光纤,用于接收来自探针的检测光的返回光纤和将激发光纤与返回光纤耦合的定向耦合器。 定向耦合器位于最靠近探头的载体电缆的端部附近。 多个这些光纤探针可以使用多个载体电缆复用,每个电缆具有用于接收激发光的相应的激励光纤,并将激发光提供给多个光纤探针中的相应的一个。

    Controlling shape of a reticle with low friction film coating at backside
    4.
    发明申请
    Controlling shape of a reticle with low friction film coating at backside 失效
    控制后面具有低摩擦膜涂层的掩模版的形状

    公开(公告)号:US20080204694A1

    公开(公告)日:2008-08-28

    申请号:US11712192

    申请日:2007-02-28

    IPC分类号: G03B27/62

    CPC分类号: G03B27/62

    摘要: In an embodiment of the invention, an apparatus includes a reticle having a frontside including a pattern to be imaged onto a semiconductor wafer, a thin film located over a backside of the reticle to form a global convex shape and to reduce friction when sliding on a chuck, and the chuck having a topside to which the backside of the reticle conforms.

    摘要翻译: 在本发明的一个实施例中,一种装置包括具有正面的掩模版,该掩模版包括要成像到半导体晶片上的图案,位于掩模版背面之上的薄膜,以形成全局凸形,并且当在 卡盘,并且卡盘具有顶盖的背面符合的顶侧。

    Controlling shape of a reticle with low friction film coating at backside
    5.
    发明授权
    Controlling shape of a reticle with low friction film coating at backside 失效
    控制后面具有低摩擦膜涂层的掩模版的形状

    公开(公告)号:US07759024B2

    公开(公告)日:2010-07-20

    申请号:US11712192

    申请日:2007-02-28

    IPC分类号: G03F1/00

    CPC分类号: G03B27/62

    摘要: In an embodiment of the invention, an apparatus includes a reticle having a frontside including a pattern to be imaged onto a semiconductor wafer, a thin film located over a backside of the reticle to form a global convex shape and to reduce friction when sliding on a chuck, and the chuck having a topside to which the backside of the reticle conforms.

    摘要翻译: 在本发明的一个实施例中,一种装置包括具有正面的掩模版,该掩模版包括要成像到半导体晶片上的图案,位于掩模版背面之上的薄膜,以形成全局凸形,并且当在 卡盘,并且卡盘具有顶盖的背面符合的顶侧。

    Double window for protecting optical sensors from hazardous environments
    6.
    发明授权
    Double window for protecting optical sensors from hazardous environments 失效
    用于保护光学传感器免受危险环境的双重窗口

    公开(公告)号:US5608515A

    公开(公告)日:1997-03-04

    申请号:US425548

    申请日:1995-04-20

    CPC分类号: F23N5/08 G01J5/041 Y02T50/677

    摘要: An optical sensor system includes a housing having an open end; first and second windows situated in the housing; a fastener for situating the first window closer to the open end than the second window and permitting an air exchange between a sensing region and the second window; a hermetic seal between the second window and the housing; and an optical sensor situated between the second window and a wall of the housing such that the air exchange does not occur inside the optical sensor. The first and second windows can include materials selected from the group consisting of sapphire, quartz, and glass; the optical sensor to be protected can include silicon carbide; and the sensing region can include a combustion region. If the sensing region includes a combustion region, the first window is situated at a location in the housing sufficiently near enough to the combustion region to vaporize hydrocarbons in the vicinity of the first window, and the second window is situated a location sufficiently far enough from the combustion region so that the hermetic seal remains stable.

    摘要翻译: 光学传感器系统包括具有开口端的壳体; 位于壳体中的第一和第二窗口; 紧固件,用于将第一窗口定位成比第二窗口更靠近开口端,并允许感测区域和第二窗口之间的空气交换; 在第二窗口和壳体之间的密封; 以及位于第二窗口和壳体的壁之间的光学传感器,使得在光学传感器内部不发生空气交换。 第一和第二窗口可以包括从由蓝宝石,石英和玻璃组成的组中选择的材料; 待保护的光学传感器可以包括碳化硅; 并且感测区域可以包括燃烧区域。 如果感测区域包括燃烧区域,则第一窗口位于壳体中足够靠近燃烧区域的位置,以使第一窗口附近的碳氢化合物蒸发,并且第二窗口位于足够远离足够远的位置 燃烧区域使得气密密封保持稳定。

    Optical sensing of combustion dynamics
    7.
    发明授权
    Optical sensing of combustion dynamics 失效
    燃烧动力学的光学感应

    公开(公告)号:US5544478A

    公开(公告)日:1996-08-13

    申请号:US339843

    申请日:1994-11-15

    IPC分类号: F23N5/08 F23N5/16 F02C9/28

    摘要: An optical radiation detector, such as a silicon carbide photodiode ultraviolet radiation detector, is employed for real time, noninvasive monitoring and diagnosis of combustion dynamics in gas turbine engines. The SiC photodiode responds to flame ultraviolet emission, and a Fast Fourier Transform spectrum analyzer peak acoustic frequency components of the detector signal as indicators of systematic gas pressure vibrations related to combustion. The combustion may be modified in accordance with the monitored acoustic frequency components.

    摘要翻译: 诸如碳化硅光电二极管紫外线辐射检测器的光学辐射检测器被用于对燃气涡轮发动机中的燃烧动态进行实时,无创的监测和诊断。 SiC光电二极管响应火焰紫外线发射,快速傅里叶变换频谱分析仪的峰值声频分量作为系统气体振动与燃烧相关的振动信号。 燃烧可以根据监测的声频分量进行修改。