公开(公告)号：US07867924B2

公开(公告)日：2011-01-11

申请号：US12038278

申请日：2008-02-27

申请人： Jong-wan Choi ,  Eun-kyung Baek ,  Sang-hoon Ahn ,  Hong-gun Kim ,  Dong-chul Suh ,  Yong-soon Choi

发明人： Jong-wan Choi ,  Eun-kyung Baek ,  Sang-hoon Ahn ,  Hong-gun Kim ,  Dong-chul Suh ,  Yong-soon Choi

IPC分类号： H01L21/4763

CPC分类号： H01L21/76224 ,  H01L21/823481

摘要： A method of fabricating a semiconductor device includes forming a lower device on a lower semiconductor substrate, and forming an interlayer insulating film on the lower device. An upper semiconductor substrate is formed on the interlayer insulating film such that the interlayer insulating film is between the lower and upper semiconductor substrates. Upper trenches are formed within the upper semiconductor substrate. An upper device isolating film is formed within the upper trenches. The upper device isolating film is irradiated with ultraviolet light having a wavelength configured to break chemical bonds of impurities in the upper device isolating film to reduce an impurity concentration thereof.

摘要翻译： 制造半导体器件的方法包括在下半导体衬底上形成下部器件，并在下部器件上形成层间绝缘膜。 在层间绝缘膜上形成上半导体衬底，使得层间绝缘膜位于下半导体衬底和上半导体衬底之间。 上沟槽形成在上半导体衬底内。 上部器件隔离膜形成在上部沟槽内。 用上述器件隔离膜中的杂质化学键的波长的紫外线照射上部器件隔离膜以降低其杂质浓度。

公开(公告)号：US20080206954A1

公开(公告)日：2008-08-28

申请号：US12038278

申请日：2008-02-27

申请人： Jong-wan Choi ,  Eun-kyung Baek ,  Sang-hoon Ahn ,  Hong-gun Kim ,  Dong-chul Suh ,  Yong-soon Choi

发明人： Jong-wan Choi ,  Eun-kyung Baek ,  Sang-hoon Ahn ,  Hong-gun Kim ,  Dong-chul Suh ,  Yong-soon Choi

IPC分类号： H01L21/762

CPC分类号： H01L21/76224 ,  H01L21/823481

摘要： A method of fabricating a semiconductor device includes forming a lower device on a lower semiconductor substrate, and forming an interlayer insulating film on the lower device. An upper semiconductor substrate is formed on the interlayer insulating film such that the interlayer insulating film is between the lower and upper semiconductor substrates. Upper trenches are formed within the upper semiconductor substrate. An upper device isolating film is formed within the upper trenches. The upper device isolating film is irradiated with ultraviolet light having a wavelength configured to break chemical bonds of impurities in the upper device isolating film to reduce an impurity concentration thereof.

摘要翻译： 制造半导体器件的方法包括在下半导体衬底上形成下部器件，并在下部器件上形成层间绝缘膜。 在层间绝缘膜上形成上半导体衬底，使得层间绝缘膜位于下半导体衬底和上半导体衬底之间。 上沟槽形成在上半导体衬底内。 上部器件隔离膜形成在上部沟槽内。 用上述器件隔离膜中的杂质化学键的波长的紫外线照射上部器件隔离膜以降低其杂质浓度。