Silicon wafer based macroscopic mirror for wide angle scanning applications
    1.
    发明授权
    Silicon wafer based macroscopic mirror for wide angle scanning applications 失效
    用于广角扫描应用的基于硅晶片的宏观镜

    公开(公告)号:US07130098B2

    公开(公告)日:2006-10-31

    申请号:US10611631

    申请日:2003-07-01

    Inventor: Joseph T. Pesik

    Abstract: A macroscopic mirror for wide angle scanning applications comprises: a silicon substrate section of a predetermined shape and macroscopic size cut from a silicon wafer comprising a flat, polished surface side and an etched, rough surface side; and a plurality of layers, including a layer of reflective medium, disposed on the flat, polished surface of the substrate section in such a manner to minimize flexural distortion of the flat surface. The macroscopic mirror is made by a method comprising the steps of: preparing the silicon wafer by polishing one side to a predetermined flatness and etching the other side to a predetermined roughness; cutting the substrate section from the prepared silicon wafer to a predetermined shape and macroscopic size; and applying the plurality of layers on the flat, polished surface. The macroscopic mirror is included in a mirror system wherein the rough surface side is bonded to supporting arms of a drive mechanism which scans the mirror at a predetermined scanning rate in at least one plane of rotation.

    Abstract translation: 用于广角扫描应用的宏观镜包括:从硅晶片切割出预定形状和宏观尺寸的硅衬底部分,其包括平坦抛光表面侧和蚀刻的粗糙表面侧; 以及多个层,包括反射介质层,以使得平坦表面的弯曲变形最小化的方式设置在基板部分的平坦抛光表面上。 宏观镜是通过以下步骤制成的:通过将一侧抛光至预定的平面度并将另一侧蚀刻到预定的粗糙度来制备硅晶片; 将衬底部分从所制备的硅晶片切割成预定形状和宏观尺寸; 以及将所述多个层施加在所述平坦抛光表面上。 宏观镜包括在镜系统中,其中粗糙表面侧结合到在至少一个旋转平面中以预定扫描速率扫描反射镜的驱动机构的支撑臂。

    Silicon wafer based macroscopic mirror for wide angle scanning applications
    2.
    发明授权
    Silicon wafer based macroscopic mirror for wide angle scanning applications 失效
    用于广角扫描应用的基于硅晶片的宏观镜

    公开(公告)号:US06953254B2

    公开(公告)日:2005-10-11

    申请号:US10921522

    申请日:2004-08-19

    Inventor: Joseph T. Pesik

    Abstract: A macroscopic mirror for wide angle scanning applications comprises: a silicon substrate section of a predetermined shape and macroscopic size cut from a silicon wafer comprising a flat, polished surface side and an etched, rough surface side; and a plurality of layers, including a layer of reflective medium, disposed on the flat, polished surface of the substrate section in such a manner to minimize flexural distortion of the flat surface. The macroscopic mirror is made by a method comprising the steps of: preparing the silicon wafer by polishing one side to a predetermined flatness and etching the other side to a predetermined roughness; cutting the substrate section from the prepared silicon wafer to a predetermined shape and macroscopic size; and applying the plurality of layers on the flat, polished surface. The macroscopic mirror is included in a mirror system wherein the rough surface side is bonded to supporting arms of a drive mechanism which scans the mirror at a predetermined scanning rate in at least one plane of rotation.

    Abstract translation: 用于广角扫描应用的宏观镜包括:从硅晶片切割出预定形状和宏观尺寸的硅衬底部分,其包括平坦抛光表面侧和蚀刻的粗糙表面侧; 以及多个层,包括反射介质层,以使得平坦表面的弯曲变形最小化的方式设置在基板部分的平坦抛光表面上。 宏观镜是通过以下步骤制成的:通过将一侧抛光至预定的平面度并将另一侧蚀刻到预定的粗糙度来制备硅晶片; 将衬底部分从所制备的硅晶片切割成预定形状和宏观尺寸; 以及将所述多个层施加在所述平坦抛光表面上。 宏观镜包括在镜系统中,其中粗糙表面侧结合到在至少一个旋转平面中以预定扫描速率扫描反射镜的驱动机构的支撑臂。

    System for profiling objects on terrain forward and below an aircraft utilizing a cross-track laser altimeter
    3.
    发明授权
    System for profiling objects on terrain forward and below an aircraft utilizing a cross-track laser altimeter 失效
    用于使用跨轨道激光高度计对飞机前方和下方的地形进行分析的系统

    公开(公告)号:US07095488B2

    公开(公告)日:2006-08-22

    申请号:US10347908

    申请日:2003-01-21

    Abstract: A forward looking cross-track laser altimeter comprises: a first configuration of optical elements for guiding pulsed laser beams along a first optical path; a mirror element coupled to a scanner and disposed in the first optical path, the scanner operative to oscillate the mirror element to sweep the reflected laser beams back and forth across a line at a predetermined frequency; the scanner and mirror element configurable to reflect the pulsed laser beams along paths forward and downward at a predetermined angle to the flight path of the aircraft, wherein the pulsed laser beam paths are caused to be line swept across a ground track forward the aircraft; the mirror element for receiving returns of the pulsed laser beams from the terrain and objects on the terrain forward the aircraft and reflecting the returns along a second optical path to a light detector which produces a return signal in response thereto; a first circuit governed by the return signals for measuring times-of-flight of the returns and generating time-of-flight signals corresponding thereto; the scanner for generating a line sweep position signal; and a second circuit for generating for each return a data profile comprising range and line sweep position thereof based on the corresponding time-of-flight and position signals.

    Abstract translation: 一种前视的跨轨道激光高度计包括:用于沿着第一光路引导脉冲激光束的光学元件的第一配置; 耦合到扫描器并设置在第一光路中的反射镜元件,扫描仪可操作以使镜子元件振荡以以预定频率跨过线扫描反射的激光束; 扫描器和镜子元件可配置成沿着沿着飞行器的飞行路径的预定角度向前和向下沿着路径反射脉冲激光束,其中使脉冲激光束路径沿着飞机前方的地面轨道扫过; 用于接收来自地形的脉冲激光束和地形上的物体的返回的反射镜元件,并且将第二光路反射回到光检测器,光检测器响应于该检测器产生返回信号; 由返回信号控制的第一电路,用于测量返回的飞行时间并产生对应于其的飞行时间信号; 用于产生行扫描位置信号的扫描器; 以及第二电路,用于基于相应的飞行时间和位置信号,为每个返回产生包括其范围和行扫描位置的数据简档。

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