公开(公告)号：US08149387B2

公开(公告)日：2012-04-03

申请号：US12248586

申请日：2008-10-09

申请人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Abraham Alexander Soethoudt

发明人： Jozef Augustinus Maria Alberti ,  Gerardus Petrus Matthijs Van Nunen ,  Frans Erik Groensmit ,  Rene Theodorus Petrus Compen ,  Abraham Alexander Soethoudt

IPC分类号： G03B27/58 ,  G03B27/62

CPC分类号： G03F7/70783 ,  G03F7/70633

摘要： A method is provided for placing a substrate onto a surface of a substrate holder, the surface having a plurality of burls. First substrate placement data is calculated. This data enables placement of the substrate at a certain position with respect to a position of the plurality of burls on the surface of the substrate holder. Then, the substrate is placed at the certain position in accordance with the substrate placement data. The certain position may be based on the position at which placement would result in a minimized overlay error or may be based on the position at which placement would result in minimized substrate deformation.

摘要翻译： 提供了一种将衬底放置在衬底保持器的表面上的方法，该表面具有多个毛刺。 计算第一衬底放置数据。 该数据使得能够将衬底相对于衬底保持器表面上的多个毛刺的位置放置在特定位置。 然后，根据基板放置数据将基板放置在特定位置。 该位置可以基于放置将导致最小重叠误差的位置，或者可以基于放置将导致最小化的基板变形的位置。

公开(公告)号：US20130033691A1

公开(公告)日：2013-02-07

申请号：US13641212

申请日：2011-02-21

申请人： Abraham Alexander Soethoudt

发明人： Abraham Alexander Soethoudt

IPC分类号： G03B27/58

CPC分类号： G03F7/70725 ,  G03F7/70783

摘要： A method and apparatus for loading a substrate (W) onto a substrate table (WT) then moving the substrate table such that, in the reference frame of the substrate, the substrate table accelerates downwards with an acceleration which is at least 10% of the acceleration due to gravity, thereby reducing friction between the substrate and the substrate table such that deformations of the substrate may at least partially dissipate from the substrate.

摘要翻译： 一种用于将衬底（W）加载到衬底台（WT）上然后移动衬底台的方法和装置，使得在衬底的参考系中，衬底台以加速度向下加速，加速度至少为 由于重力引起的加速，从而减小基板和基板台之间的摩擦，使得基板的变形可以至少部分地从基板上散出。