公开(公告)号：US06822248B2

公开(公告)日：2004-11-23

申请号：US09809766

申请日：2001-03-15

申请人： Juan Ferrera ,  James G. Goodberlet ,  Timothy R. Groves ,  John G. Hartley ,  Mark K. Mondol ,  Mark L. Schattenburg ,  Henry I. Smith

发明人： Juan Ferrera ,  James G. Goodberlet ,  Timothy R. Groves ,  John G. Hartley ,  Mark K. Mondol ,  Mark L. Schattenburg ,  Henry I. Smith

IPC分类号： H01J3708

CPC分类号： H01J37/3174 ,  G03F1/78 ,  H01J37/3045

摘要： Fine positioning of a shaped or patterned charged particle beam without use of intrusive fiducial marks is achieved by providing a dithered shadow pattern, preferably in the form of a grid, within the shaped or patterned charged particle beam. Light output from fiducial marks preferably formed of a scintillating material is reduced when the dithered shadow pattern is incident on some or all of the fiducial marks. The timing of the incidence of the shadow pattern on fiducial marks indicates the position of the shaped or patterned charged particle beam such that correction of the beam position on the target can be corrected to a small fraction of system resolution. The dither pattern and repetition period is chosen to avoid interference with uniformity of beam illumination of the target. Feedback of position error thus provides phase locked position correction in real time and is suitable for mask making since the fiducial marks are not intrusive.

摘要翻译： 通过在成形或图案化的带电粒子束内提供优选为栅格形式的抖动阴影图案，实现成形或图案化带电粒子束的精细定位而不使用侵入性基准标记。 当抖动的阴影图案入射到一些或所有基准标记上时，优选由闪烁材料形成的基准标记的光输出减小。 阴影图案在基准标记上的发生时间表示成形或图案化的带电粒子束的位置，使得可以将目标上的光束位置的校正校正到系统分辨率的一小部分。 选择抖动图案和重复周期以避免对目标的光束照明的均匀性的干扰。 位置误差的反馈因此提供实时的锁相位置校正，并且适合于掩模制作，因为基准标记不是侵入的。

公开(公告)号：US5136169A

公开(公告)日：1992-08-04

申请号：US681580

申请日：1991-04-05

申请人： Henry I. Smith ,  Erik H. Anderson ,  Mark L. Schattenburg

发明人： Henry I. Smith ,  Erik H. Anderson ,  Mark L. Schattenburg

IPC分类号： H01J37/304

CPC分类号： H01J37/3174 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/3045 ,  G03F7/2059 ,  H01J2237/3175

摘要： A method of monitoring the travel of a beam of energy on a substrate having a fiducial pattern rigidly fixed relative to the substrate, the pattern embracing an area where the beam can create a useful image with submicron precision. The method includes: adjusting the beam such that the dose delivered by the beam is sufficiently high to generate a signal produced by the interaction of the beam and the fiducial pattern, the signal being representative of the relative position of the fiducial pattern and the travel, the dose being sufficiently low so that the area of the substrate over which the beam passes remains receptive to subsequent creation, with submicron precision, of a useful image; moving the beam across the substrate; detecting the signal produced by the interaction of the beam with the fiducial pattern; and comparing the detected signal with a predetermined signal to provide a position signal representative of the beam travel with submicron precision.

摘要翻译： 监测在具有相对于衬底刚性固定的基准图案的衬底上的能量束行进的方法，所述图案包含光束可以以亚微米精度创建有用图像的区域。 该方法包括：调整光束使得由光束输送的剂量足够高以产生由光束与基准图案的相互作用产生的信号，该信号代表基准图案和行进的相对位置， 剂量足够低，使得光束通过的衬底的面积保持接受有用图像的亚微米精度的后续生成; 将光束移动穿过基板; 检测由光束与基准图案的相互作用产生的信号; 并且将检测到的信号与预定信号进行比较，以提供表示具有亚微米精度的光束行进的位置信号。

公开(公告)号：US4890309A

公开(公告)日：1989-12-26

申请号：US18587

申请日：1987-02-25

申请人： Henry I. Smith ,  Erik H. Anderson ,  Mark L. Schattenburg

发明人： Henry I. Smith ,  Erik H. Anderson ,  Mark L. Schattenburg

IPC分类号： G03F1/22 ,  G03F1/32 ,  G03F7/20

CPC分类号： G03F1/22 ,  G03F1/32 ,  G03F7/70283

摘要： The mask includes an attenuator which passes a fraction of the incident electromagnetic radiation and phase shifts the radiation relative to the radiation passing through open features of the mask by approximately an odd multiple of .pi. radians. This phase shifting of light passing through the attenuator by .pi. radians reduces the edge blurring that results from diffraction effects. The present invention steepens the slope of the intensity profile at the edges of features in x-ray lithographic replication relative to the slope obtained with a conventional x-ray mask. The steeper slope is a highly significant advantage because it permits improved linewidth control.

摘要翻译： 该掩模包括衰减器，该衰减器通过入射的电磁辐射的一部分，并且相对于通过掩模的开放特征的辐射将辐射相移大约奇数倍的p​​i弧度。 通过pi弧度通过衰减器的光的相移减少了由衍射效应引起的边缘模糊。 本发明相对于用常规x射线掩模获得的斜率，使X射线光刻复制中的特征边缘处的强度分布的斜率变得更为突出。 更陡峭的斜率是非常显着的优点，因为它允许改进的线宽控制。

公开(公告)号：US5142385A

公开(公告)日：1992-08-25

申请号：US643141

申请日：1991-01-09

申请人： Erik H. Anderson ,  Henry I. Smith ,  Mark L. Schattenburg

发明人： Erik H. Anderson ,  Henry I. Smith ,  Mark L. Schattenburg

IPC分类号： G03F7/00 ,  G03F7/20 ,  G03H1/04

CPC分类号： G03F7/70408 ,  G03F7/001 ,  G03H1/0486 ,  G03H2001/0489

摘要： First and second coherent beams illuminate a common area on an exposure station. A phase detector senses the relative phase between the first and second beams to provide a control signal. There is at least one phase shifter in the path of at least one of the coherent beams. The control signal is coupled to the phase shifter to adjust the phase imparted thereby so that the relative phase between the first and second coherent beams is substantially constant.

摘要翻译： 第一和第二相干光束照射曝光台上的公共区域。 相位检测器检测第一和第二光束之间的相对相位以提供控制信号。 在至少一个相干光束的路径中至少有一个移相器。 控制信号耦合到移相器以调节由此赋予的相位，使得第一和第二相干光束之间的相对相位基本上恒定。

公开(公告)号：US08025832B2

公开(公告)日：2011-09-27

申请号：US12227419

申请日：2007-05-24

申请人： Mireille K. Akilian ,  Mark L. Schattenburg

发明人： Mireille K. Akilian ,  Mark L. Schattenburg

IPC分类号： B29C51/08

CPC分类号： B29C51/10 ,  B29C51/42 ,  B29K2033/12 ,  B29L2031/778 ,  C03B23/0235 ,  C03B23/0252 ,  C03B23/0355 ,  C03B29/025 ,  C03B29/08 ,  C03B35/16

摘要： Processes and apparati for shaping sheet glass or thermoplastic materials use force from a layer of a flowing fluid, such as air, between the sheet and a mandrel at close to the softening temperature of the thermoplastic. The shape is preserved by cooling. The shape of the air bearing mandrel and the pressure distribution of the fluid contribute to the final shape. A process can be conducted on one or two surfaces such that the force from the air layer is on one or two surfaces of the sheet. The gap size between the sheet and mandrel determines the pressure profile in the gap, which also determines the final sheet shape. In general, smaller gaps lead to larger viscous forces. The pressure profile depends on the shape of the mandrel, the size of the fluid gap and the sheet and the fluid supply pressure.

摘要翻译： 成型片状玻璃或热塑性材料的方法和装置在接近热塑性塑料的软化温度的作用下，从片材和心轴之间的流动流体（例如空气）层的力量使用。 形状通过冷却保存。 空气轴承心轴的形状和流体的压力分布有助于最终形状。 一个工艺可以在一个或两个表面上进行，使得来自空气层的力在片材的一个或两个表面上。 片材和心轴之间的间隙尺寸确定间隙中的压力分布，这也决定了最终的片材形状。 通常，较小的间隙导致较大的粘性力。 压力分布取决于心轴的形状，流体间隙和片材的尺寸以及流体供应压力。

公开(公告)号：US20090302511A1

公开(公告)日：2009-12-10

申请号：US12227419

申请日：2007-05-24

申请人： Mireille K. Akilian ,  Mark L. Schattenburg

发明人： Mireille K. Akilian ,  Mark L. Schattenburg

IPC分类号： B29C51/06

CPC分类号： B29C51/10 ,  B29C51/42 ,  B29K2033/12 ,  B29L2031/778 ,  C03B23/0235 ,  C03B23/0252 ,  C03B23/0355 ,  C03B29/025 ,  C03B29/08 ,  C03B35/16

摘要： Processes and apparati for shaping sheet glass or thermoplastic materials use force from a layer of a flowing fluid, such as air, between the sheet and a mandrel at close to the softening temperature of the thermoplastic. The shape is preserved by colling. The shape of the air bearing mandrel and the pressure distribution of the fluid contribute to the final shape. A process can be conducted on one or two surfaces such that the force from the air layer is on one or two surfaces of the sheet. The gap size between the sheet and mandrel determines the pressure profile in the gap, which also determines the final sheet shape. In general, smaller gaps lead to larger viscous forces. The pressure profile depends on the shape of the mandrel, the size of the fluid gap and the sheet and the fluid supply pressure.

摘要翻译： 成型片状玻璃或热塑性材料的方法和装置在接近热塑性塑料的软化温度的作用下，从片材和心轴之间的流动流体（例如空气）层的力量使用。 形状由科灵保存。 空气轴承心轴的形状和流体的压力分布有助于最终形状。 一个工艺可以在一个或两个表面上进行，使得来自空气层的力在片材的一个或两个表面上。 片材和心轴之间的间隙尺寸确定间隙中的压力分布，这也决定了最终的片材形状。 通常，较小的间隙导致较大的粘性力。 压力分布取决于心轴的形状，流体间隙和片材的尺寸以及流体供应压力。