Sequential mesa avalanche photodiode capable of realizing high sensitization and method of manufacturing the same

    公开(公告)号:US06791124B2

    公开(公告)日:2004-09-14

    申请号:US10238362

    申请日:2002-09-09

    IPC分类号: H01L310328

    摘要: A sequential mesa type avalanche photodiode (APD) comprises a semiconductor substrate and a sequential mesa portion formed on the substrate. In the sequential mesa portion, a plurality of semiconductor layers, including a light absorbing layer and a multiplying layer, are laminated by epitaxial growth. In the plurality of semiconductor layers, a pair of semiconductor layers forming a pn junction is included. The carrier density of a semiconductor layer which is near to the substrate among the pair of semiconductor layers is larger than the carrier density of a semiconductor layer which is far from the substrate among the pair of semiconductor layers. In the APD, light-receiving current based on movement of electrons and positive holes generated in the sequential mesa portion when light is incident from the substrate toward the light absorbing layer is larger at a central portion than at a peripheral portion of the sequential mesa portion.

    Sequential mesa avalanche photodiode capable of realizing high sensitization and method of manufacturing the same
    2.
    发明授权
    Sequential mesa avalanche photodiode capable of realizing high sensitization and method of manufacturing the same 失效
    能够实现高感光度的顺序台面雪崩光电二极管及其制造方法

    公开(公告)号:US06936868B2

    公开(公告)日:2005-08-30

    申请号:US10768927

    申请日:2004-01-30

    摘要: A sequential mesa type avalanche photodiode (APD) includes a semiconductor substrate and a sequential mesa portion formed on the substrate. In the sequential mesa portion, a plurality of semiconductor layers, including a light absorbing layer and a multiplying layer, are laminated by epitaxial growth. In the plurality of semiconductor layers, a pair of semiconductor layers forming a pn junction is included. The carrier density of a semiconductor layer which is near to the substrate among the pair of semiconductor layers is larger than the carrier density of a semiconductor layer which is far from the substrate among the pair of semiconductor layers. In the APD, light-receiving current based on movement of electrons and positive holes generated in the sequential mesa portion when light is incident from the substrate toward the light absorbing layer is larger at a central portion than at a peripheral portion of the sequential mesa portion.

    摘要翻译: 顺序台面型雪崩光电二极管(APD)包括半导体衬底和形成在衬底上的顺序台面部分。 在顺序台面部分中,通过外延生长层压包括光吸收层和倍增层的多个半导体层。 在多个半导体层中,包括形成pn结的一对半导体层。 在一对半导体层中靠近衬底的半导体层的载流子密度大于远离一对半导体层中的衬底的半导体层的载流子密度。 在APD中,当光从衬底入射到光吸收层时,基于在顺序台面部分中产生的电子和正空穴移动的光接收电流在中间部分处比在顺序台面部分的周边部分处更大 。

    Start signal outputting circuit
    3.
    发明授权
    Start signal outputting circuit 有权
    启动信号输出电路

    公开(公告)号:US07215162B2

    公开(公告)日:2007-05-08

    申请号:US10523352

    申请日:2003-09-24

    IPC分类号: H03D3/00

    CPC分类号: H03D1/18 H03G1/0023 H03G3/30

    摘要: A start signal outputting circuit according to the invention has a differential RF/DC convertor part 100 for converting a high frequency power (RF) into a d.c. potential (DC). The RF/DC convertor part 100 is formed by two transistors QRD, QDD working as a diode, and transistors QR1˜R3, QD1˜D3 and resistances RR1˜R3 for forming high resistances at anode sides and cathode sides of these diodes, respectively. A differential amplification part 200 disposed at a later stage of the diode has not only amplifying effect but also low-pass filtering effect together with filtering pars 120, 210 of its previous and later stages. In this case, it is designed so that current flowing through the respective circuits is about 2˜3 μA. As a result, even if the high frequency power of the specified frequency is weak, for example −60˜−40 dBm, a start signal outputting circuit 1000 which outputs a d.c. potential of 0.3˜2.4V, is suitable for integration and has a low power consumption can be obtained.

    摘要翻译: 根据本发明的启动信号输出电路具有差分RF / DC转换器部分100,用于将高频功率(RF)转换成直流 电位(DC)。 RF / DC转换器部分100由作为二极管工作的两个晶体管Q 1,D 2,D 2和D 2形成,晶体管Q 1至R 3, 分别用于在这些二极管的阳极侧和阴极侧形成高电阻的电阻R 1〜R 3〜R 3。 设置在二极管的稍后阶段的差分放大部分200不仅具有放大效应,而且还具有低通滤波效果以及其前一级和后级级的滤波器120,210。 在这种情况下,其设计使得流过各个电路的电流约为2〜3μA。 结果,即使指定频率的高频功率弱,例如-60〜-40dBm,也可以是输出直流电平的启动信号输出电路1000。 电位为0.3〜2.4V,适合集成,具有低功耗可以获得。

    Filtering type frequency switching circuit
    4.
    发明授权
    Filtering type frequency switching circuit 失效
    滤波式频率切换电路

    公开(公告)号:US07301419B2

    公开(公告)日:2007-11-27

    申请号:US10545365

    申请日:2004-04-16

    IPC分类号: H01P1/10 H01P5/12

    CPC分类号: H01P1/15

    摘要: Two lines Ai1 (i=1 or 2) are connected to an input terminal In. The line Ai1 is grounded via a capacitor Ci1. The line Ai1 and a line Bi1 form a coupled line. One end of the line Bi1 is connected to a positive pole of a diode Di1 which is grounded at its negative pole. Lines Bi0 and Bi2 are connected to the other end of the line Bi1. The other end of the line Bi0 is connected to a capacitor Ci0 which is grounded at its other end and a resistor Ri0 which is connected to a voltage control terminal VCTLi at its other end. The other end of the line Bi2 is connected to the positive pole of a diode Di2. The line Bi2 and the line Ai2 form a coupled line. One end of the line Ai2 is connected to an output terminal Out-i, and the other end is grounded via a capacitor Ci2. The output of the terminals Out-1, 2 are switched to 5.8 GHz band, 4.8 GHz band and cut-off, by applying to VCTL1 and VCTL2 three potentials, that is, ground potential. positive potential which causes no current flow and positive potential which causes current flow.

    摘要翻译: 两条线Ai 1(i = 1或2)连接到输入端子In。 线A 1 通过电容器C i1 1接地。 线A 1 和线B 1 i 1 <1>形成耦合线。 线B 的一端连接到在其负极处接地的二极管D 1 i1的正极。 线B&lt; i0&gt;和B&lt; i2&gt;连接到线B 1 i 1的另一端。 线路B01的另一端连接到在其另一端接地的电容器C i0,并且电阻器R i0 在其另一端连接到电压控制端子V CTL1。 线B 2 i 2的另一端连接到二极管D 2 i2的正极。 线B 2 i2和线A 2 2 2形成耦合线。 线路A 1的一端连接到输出端子Out-i,另一端通过电容器C i2接地。 通过施加到V CTL1和V CTL2三个电位,将端子Out-1,2的输出切换到5.8GHz频带,4.8GHz频带和截止频率, 那就是地面潜力。 没有导致电流流动的正电位和导致电流流动的正电位。

    Filtering function-equipped high frequency switching circuit
    5.
    发明申请
    Filtering function-equipped high frequency switching circuit 失效
    滤波功能配备的高频开关电路

    公开(公告)号:US20060192630A1

    公开(公告)日:2006-08-31

    申请号:US10545365

    申请日:2004-04-16

    IPC分类号: H01P1/15

    CPC分类号: H01P1/15

    摘要: Two lines Ai1 (i=1 or 2) are connected to an input terminal In. The line Ai1 is grounded via a capacitor Ci1. The line Ai1 and a line Bi1 form a coupled line. One end of the line Bi1 is connected to a positive pole of a diode Di1 which is grounded at its negative pole. Lines Bi0 and Bi2 are connected to the other end of the line Bi1. The other end of the line Bi0 is connected to a capacitor Ci0 which is grounded at its other end and a resistor Ri0 which is connected to a voltage control terminal VCTLi at its other end. The other end of the line Bi2 is connected to the positive pole of a diode Di2. The line Bi2 and the line Ai2 form a coupled line. One end of the line Ai2 is connected to an output terminal Out-i, and the other end is grounded via a capacitor Ci2. The output of the terminals Out-1, 2 are switched to 5.8 GHz band, 4.8 GHz band and cut-off, by applying to VCTL1 and VCTL2 three potentials, that is, ground potential. positive potential which causes no current flow and positive potential which causes current flow.

    摘要翻译: 两条线Ai 1(i = 1或2)连接到输入端子In。 线A 1 通过电容器C i1 1接地。 线A 1 和线B 1 i 1 <1>形成耦合线。 线B 的一端连接到在其负极处接地的二极管D 1 i1的正极。 线B&lt; i0&gt;和B&lt; i2&gt;连接到线B 1 i 1的另一端。 线路B01的另一端连接到在其另一端接地的电容器C i0,并且电阻器R i0 在其另一端连接到电压控制端子V CTL1。 线B 2 i 2的另一端连接到二极管D 2 i2的正极。 线B 2 i2和线A 2 2 2形成耦合线。 线路A 1的一端连接到输出端子Out-i,另一端通过电容器C i2接地。 通过施加到V CTL1和V CTL2三个电位,将端子Out-1,2的输出切换到5.8GHz频带,4.8GHz频带和截止频率, 那就是地面潜力。 没有导致电流流动的正电位和导致电流流动的正电位。

    Activation signal output circuit and determining circuit
    6.
    发明申请
    Activation signal output circuit and determining circuit 失效
    激活信号输出电路和确定电路

    公开(公告)号:US20060071654A1

    公开(公告)日:2006-04-06

    申请号:US10536338

    申请日:2003-11-26

    IPC分类号: G01R25/00

    CPC分类号: H03D1/10 H03D1/18

    摘要: A start signal output circuit having an RF/DC conversion circuit to which radio frequency power (RF) of specified frequency is inputted and from which a direct current potential (DC) is outputted, comprises a detection/amplification circuit 210 which includes a voltage doubler wave-detector circuit 10 configured including a sensing diode Q1 (Tr34) for sensing the RF power, a differential amplifier including differential pair transistors Tr31 and Tr32, and a current mirror circuit. A base current of one Tr31 of the differential pair transistors is brought into substantial agreement with a DC component of a current flowing through the sensing diode Q1 (Tr34). A total of currents flowing through the differential pair transistors Tr31 and Tr32 is regulated to a substantially constant value by the current mirror circuit. Thus, the start signal output circuit which is small in size, high in sensitivity and low in power consumption can be realized.

    摘要翻译: 具有输入了特定频率的射频功率(RF)并从其输出直流电位(DC)的RF / DC转换电路的启动信号输出电路包括检测/放大电路210,其包括倍压器 波检测器电路10被配置为包括用于感测RF功率的感测二极管Q 1(Tr 34),包括差分对晶体管Tr 31和Tr 32的差分放大器和电流镜电路。 差分对晶体管的一个Tr 31的基极电流与流经感测二极管Q 1(Tr 34)的电流的直流分量基本一致。 流过差分对晶体管Tr 31和Tr 32的总电流通过电流镜电路被调节到基本恒定的值。 因此,可以实现尺寸小,灵敏度高,功耗低的启动信号输出电路。

    Activation signal output circuit and determination circuit
    7.
    发明授权
    Activation signal output circuit and determination circuit 失效
    激活信号输出电路和确定电路

    公开(公告)号:US07209842B2

    公开(公告)日:2007-04-24

    申请号:US10536338

    申请日:2003-11-26

    IPC分类号: G06F19/00

    CPC分类号: H03D1/10 H03D1/18

    摘要: A start signal output circuit having an RF/DC conversion circuit to which radio frequency power (RF) of specified frequency is inputted and from which a direct current potential (DC) is outputted, comprises a detection/amplification circuit 210 which includes a voltage doubler wave-detector circuit 10 configured including a sensing diode Q1 (Tr34) for sensing the RF power, a differential amplifier including differential pair transistors Tr31 and Tr32, and a current mirror circuit. A base current of one Tr31 of the differential pair transistors is brought into substantial agreement with a DC component of a current flowing through the sensing diode Q1 (Tr34). A total of currents flowing through the differential pair transistors Tr31 and Tr32 is regulated to a substantially constant value by the current mirror circuit. Thus, the start signal output circuit which is small in size, high in sensitivity and low in power consumption can be realized.

    摘要翻译: 具有输入了特定频率的射频功率(RF)并从其输出直流电位(DC)的RF / DC转换电路的启动信号输出电路包括检测/放大电路210,其包括倍压器 波检测器电路10被配置为包括用于感测RF功率的感测二极管Q 1(Tr 34),包括差分对晶体管Tr 31和Tr 32的差分放大器和电流镜电路。 差分对晶体管的一个Tr 31的基极电流与流经感测二极管Q 1(Tr 34)的电流的直流分量基本一致。 流过差分对晶体管Tr 31和Tr 32的总电流通过电流镜电路被调节到基本恒定的值。 因此,可以实现尺寸小,灵敏度高,功耗低的启动信号输出电路。

    Start signal outputting circuit
    8.
    发明申请
    Start signal outputting circuit 有权
    启动信号输出电路

    公开(公告)号:US20060114035A1

    公开(公告)日:2006-06-01

    申请号:US10523352

    申请日:2003-09-24

    IPC分类号: H03D3/00

    CPC分类号: H03D1/18 H03G1/0023 H03G3/30

    摘要: A start signal outputting circuit according to the invention has a differential RF/DC convertor part 100 for converting a high frequency power (RF) into a d.c. potential (DC). The RF/DC convertor part 100 is formed by two transistors QRD,QDD working as a diode, and transistors QR1˜R3,QD1˜D3 and resistances RR1˜R3 for forming high resistances at anode sides andcathodesidesofthesediodes, respectively. Adifferential amplification part 200 disposed at a later stage of the diode has not only amplifying effect but also low-pass filtering effect together with filtering pars 120, 210 of its previous and later stages. In this case, it is designed so that current flowing through the respective circuits is about 2˜3 μA. As a result, even if the high frequency power of the specified frequency is weak, for example −60˜−40 dBm, a start signal outputting circuit 1000 which outputs a d.c. potential of 0.3˜2.4V, is suitable for integration and has a low power consumption can be obtained.

    摘要翻译: 根据本发明的启动信号输出电路具有差分RF / DC转换器部分100,用于将高频功率(RF)转换成直流 电位(DC)。 RF / DC转换器部分100由作为二极管工作的两个晶体管Q 1,D 2,D 2和D 2形成,晶体管Q 1至R 3, 用于在阳极侧形成高电阻的Q D1〜D3和电阻R 1〜R 3,并且分别与非二极管形成电阻。 设置在二极管的稍后级的差分放大部分200不仅具有放大效应,而且还具有低通滤波效果以及其先前和后期级的滤波器120,210。 在这种情况下,其设计使得流过各个电路的电流约为2〜3μA。 结果,即使指定频率的高频功率弱,例如-60〜-40dBm,也可以是输出直流电平的启动信号输出电路1000。 电位为0.3〜2.4V,适合集成,具有低功耗可以获得。

    Hermetically sealed magnetic sensor
    9.
    发明授权
    Hermetically sealed magnetic sensor 失效
    密封式磁传感器

    公开(公告)号:US4847557A

    公开(公告)日:1989-07-11

    申请号:US166228

    申请日:1988-03-10

    IPC分类号: G01P1/02 G01V3/10

    摘要: A hermetically sealed magnetic sensor for detecting variations in a magnetic field has a sensor element with an output terminal for detecting variations in the magnetic field and generating a signal. An output wire is connected with one end to the terminal for outputting a respective signal from the sensor element. A case having an opening on a side close to the output wire contains the sensor element. A first thermosetting resin fills the case for covering the sensor element. A second thermoplastic resin hermetically seals the opening in the case.