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公开(公告)号:US20200048107A1
公开(公告)日:2020-02-13
申请号:US16660011
申请日:2019-10-22
发明人: Yuzo SHIGESATO , Junjun Jia , Daisuke Fukushi , Hideaki Hirabayashi , Yoshinori Kataoka , Akito Sasaki , Atsuya Sasaki
摘要: According to one embodiment, nano metal compound particles are provided. The nano metal compound particles have an average particle size of 50 nm or less. The nano metal compound particles have a peak ωt of 2.8 eV or less. The peak ωt corresponds to a resonant frequency of an oscillator according to a spectroscopic ellipsometry method fitted to a Lorentz model.