公开(公告)号：US20160158696A1

公开(公告)日：2016-06-09

申请号：US14901548

申请日：2014-05-26

申请人： KANTO DENKA KOGYO CO., LTD.

发明人： Katsuhiro SAITO ,  Shinji MITA ,  Hiromi OYA ,  Shinsuke KATAYAMA ,  Yoshimasa SAKURAI ,  Shogo MASAUJI ,  Yuuki KUBOTA ,  Hidehito FUJISAWA

IPC分类号： B01D53/68 ,  C02F1/66 ,  C02F1/70 ,  C02F1/02

CPC分类号： B01D53/68 ,  B01D53/73 ,  B01D2251/50 ,  B01D2251/502 ,  B01D2251/512 ,  B01D2252/103 ,  B01D2257/204 ,  B01D2257/55 ,  C01B25/18 ,  C02F1/025 ,  C02F1/66 ,  C02F1/70 ,  C02F2101/14

摘要： A treatment process of PF5 including an absorption step for inducing absorption of PF5 by an acidic solution containing an acid to obtain a solution containing PF5A−, an adjustment step to adjust concentration of HCl in the solution, and a thermolysis step for heating the solution containing PF5A− ions obtained in the absorption step or the adjustment step to decompose the solution to an acidic mixture containing H3PO4 and HF.

摘要翻译： PF5的处理方法，包括吸收步骤，用于通过酸性溶液诱导PF5的吸收，以获得含有PF5A的溶液，调节步骤以调节溶液中HCl的浓度;以及热解步骤，用于加热含有 在吸收步骤或调整步骤中获得的PF5A-离子将溶液分解成含有H 3 PO 4和HF的酸性混合物。

公开(公告)号：US20160244331A1

公开(公告)日：2016-08-25

申请号：US15026008

申请日：2014-09-26

申请人： KANTO DENKA KOGYO CO., LTD.

发明人： Katsuhiro SAITO ,  Shinji MITA ,  Hiromi OYA ,  Shinsuke KATAYAMA ,  Yasuyuki FUJIWARA ,  Ichiro MORIMOTO ,  Hiroyuki UEHARA ,  Norihisa KIMURA

IPC分类号： C01B25/10

CPC分类号： C01B25/10

摘要： A method for obtaining high-purity phosphorus pentafluoride (PF5), which is industrially useful in the fields of semiconductors and batteries, from PF5 containing a gas mixture of HCl, HF, and so on. Specifically, provided is a process for purifying phosphorus pentafluoride including (1) an immobilization step in which phosphorus pentafluoride containing a mixture is brought into contact with a metal fluoride (MFn; M is an n-valent metal) having a specific surface area of 1.0 m2/g or more at 40° to 150° C. to immobilize phosphorus pentafluoride in the form of a hexafluorophosphate (M(PF6)n), (2) a separation step in which the mixture remaining in the gas phase is expelled out of the reaction system to separate the mixture from the hexafluorophosphate, and (3) a heat-decomposition step in which the hexafluorophosphate freed of the mixture is heated at 150° to 400° C. under a pressure of −0.1 to 0.1 MPa·G to give phosphorus pentafluoride.

摘要翻译： 从含有HCl，HF等的气体混合物的PF5获得在半导体和电池领域中有用的高纯度五氟化磷（PF5）的方法。 具体地说，提供了一种五氟化磷的净化方法，其特征在于，包括：（1）使含有混合物的五氟化磷与比表面积为1.0的金属氟化物（MFn; M为n价金属）接触的固定化工序 （M（PF 6）n）形式的五氟化磷的固定，（2）分离步骤，其中保留在气相中的混合物从 将混合物与六氟磷酸盐分离的反应体系，（3）在-0.1〜0.1MPa·G的压力下将脱离混合物的六氟磷酸盐在150〜400℃下加热的热分解工序， 给予五氟化磷。