公开(公告)号：US11427412B2

公开(公告)日：2022-08-30

申请号：US16407601

申请日：2019-05-09

申请人： KAWASAKI JUKOGYO KABUSHIKI KAISHA ,  KAWASAKI ROBOTICS (USA), INC.

发明人： Masaya Yoshida ,  Avish Ashok Bharwani ,  Ming Zeng ,  Brandon Lee ,  Ryan Le

IPC分类号： B65G47/90 ,  B25J9/16 ,  B25J15/10

摘要： A robot control unit for a substrate conveying robot raises a hand from a first lower position below a first target position at which the hand picks up a substrate to a first upper position above the first target position, and displaces at least one of a plurality of joints in one direction, in a first interval from the first lower position to a first intermediate position between the first lower position and the first target position.