公开(公告)号：US20230057869A1

公开(公告)日：2023-02-23

申请号：US17792279

申请日：2020-12-21

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Nouha ALCHEIKH ,  Sofiane BEN MBAREK ,  Mohammad YOUNIS

IPC: G01R33/028 ,  G01R33/038 ,  B81B7/02

Abstract: A method for measuring a magnetic field with a micro-sensor system includes applying a direct current (ITh) to a curved micro-beam to control a stiffness of the curved micro-beam; placing the micro-sensor system into an external magnetic field (B); selecting with a controller, based on an expected value of the external magnetic field (B), a given resonant frequency of the micro-beam; measuring with a resonant frequency tracking device the given resonant frequency of the micro-beam; and calculating in the controller the external magnetic field (B), based on (1) the measured resonant frequency, (2) the applied current (ITh), and (3) calibration data stored in the controller. The calibration data is indicative of a dependency between a change of the selected resonant frequency and the external magnetic field.