RESONANT FREQUENCY-BASED MAGNETIC SENSOR AT VEERING ZONE AND METHOD

    公开(公告)号:US20230057869A1

    公开(公告)日:2023-02-23

    申请号:US17792279

    申请日:2020-12-21

    Abstract: A method for measuring a magnetic field with a micro-sensor system includes applying a direct current (ITh) to a curved micro-beam to control a stiffness of the curved micro-beam; placing the micro-sensor system into an external magnetic field (B); selecting with a controller, based on an expected value of the external magnetic field (B), a given resonant frequency of the micro-beam; measuring with a resonant frequency tracking device the given resonant frequency of the micro-beam; and calculating in the controller the external magnetic field (B), based on (1) the measured resonant frequency, (2) the applied current (ITh), and (3) calibration data stored in the controller. The calibration data is indicative of a dependency between a change of the selected resonant frequency and the external magnetic field.

    ACTIVE MEMS MICROBEAM DEVICE FOR GAS DETECTION

    公开(公告)号:US20190383715A1

    公开(公告)日:2019-12-19

    申请号:US16076049

    申请日:2017-03-30

    Abstract: Sensors and active switches for applications in gas detection and other fields are described. The devices are based on the softening and hardening nonlinear response behaviors of microelectromechanical systems (MEMS) clamped-clamped microbeams. In that context, embodiments of gas-triggered MEMS microbeam sensors and switches are described. The microbeam devices can be coated with a Metal-Organic Framework to achieve high sensitivity. For gas sensing, an amplitude-based tracking algorithm can be used to quantify an amount of gas captured by the devices according to frequency shift. Noise analysis is also conducted according to the embodiments, which shows that the microbeam devices have high stability against thermal noise. The microbeam devices are also suitable for the generation of binary sensing information for alarming, for example.

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