公开(公告)号：US09927316B2

公开(公告)日：2018-03-27

申请号：US15024482

申请日：2014-10-02

Applicant: KISTLER HOLDING AG

Inventor： Stephane Kuehne ,  Claudio Cavalloni ,  Andreas Goehlich

IPC: G01L9/00 ,  G01L19/00 ,  G01L19/14 ,  G01L19/06

CPC classification number: G01L19/147 ,  G01L9/0045 ,  G01L9/005 ,  G01L9/0054 ,  G01L19/0627

Abstract: A micro-electro-mechanical system (MEMS) chip for measuring a pressure in a pressure space includes a MEMS substrate having a measuring region, a contact-making region connected to the measuring region via lines and having contacts, and a bushing region disposed between the measuring region and the contact-making region. The MEMS substrate defines a cavity formed as a blind hole that defines an opening through one side of the MEMS substrate, the bottom of the blind hole forming a membrane. A measuring bridge includes piezoresistive elements disposed on that side of the membrane which faces away from the cavity's opening. A carrier substrate is disposed over the cavity's opening and bonded to the MEMS substrate in a two-dimensional manner to form a rod, with the result that the carrier substrate forms a bottom wall of the cavity spaced apart from the membrane.