MEMS chip, measuring element and pressure sensor for measuring a pressure

    公开(公告)号:US09927316B2

    公开(公告)日:2018-03-27

    申请号:US15024482

    申请日:2014-10-02

    Abstract: A micro-electro-mechanical system (MEMS) chip for measuring a pressure in a pressure space includes a MEMS substrate having a measuring region, a contact-making region connected to the measuring region via lines and having contacts, and a bushing region disposed between the measuring region and the contact-making region. The MEMS substrate defines a cavity formed as a blind hole that defines an opening through one side of the MEMS substrate, the bottom of the blind hole forming a membrane. A measuring bridge includes piezoresistive elements disposed on that side of the membrane which faces away from the cavity's opening. A carrier substrate is disposed over the cavity's opening and bonded to the MEMS substrate in a two-dimensional manner to form a rod, with the result that the carrier substrate forms a bottom wall of the cavity spaced apart from the membrane.

    Charge to voltage conversion circuit for WIM sensor and WIM sensor with same
    4.
    发明授权
    Charge to voltage conversion circuit for WIM sensor and WIM sensor with same 有权
    为WIM传感器和WIM传感器充电至电压转换电路

    公开(公告)号:US09411357B2

    公开(公告)日:2016-08-09

    申请号:US14385587

    申请日:2013-03-26

    Abstract: An electronic circuit that changes a charge signal into a voltage signal within a sensor suitable for direct installation in a roadway can be connected to two single-core cables that need not be highly insulating yet can realize the required power supply of the electronics. The circuit includes an integrated impedance converter (IEPE) at the output to a two-core cable and a charge amplifier with an IC1 that has two inputs. A capacitor Cc is connected in series to the signal output of the sensor at one input of the IC1. A Zener diode D is arranged between the ground output of the sensor and the second input of the IC1 and can be supplied with power by a resistor R1 in conjunction with a power supply arranged on the output side in order to adapt the potential at the second input of the IC1.

    Abstract translation: 将电荷信号改变成适于直接安装在道路中的传感器内的电压信号的电子电路可以连接到两个不需要高度绝缘的单芯电缆,而可实现电子设备所需的电源。 该电路包括在两芯电缆的输出端的集成阻抗转换器(IEPE)和具有两个输入的IC1的电荷放大器。 在IC1的一个输入处,电容器Cc与传感器的信号输出串联连接。 一个齐纳二极管D配置在传感器的接地输出端和IC1的第二个输入端之间,并且可以通过一个电阻器R1与布置在输出端的电源一起供电,以便调整第二个电位 输入IC1。

    Measurement transducer for simultaneously measuring a force that can be both dynamic and static

    公开(公告)号:US11209325B2

    公开(公告)日:2021-12-28

    申请号:US16462097

    申请日:2017-10-05

    Abstract: A measurement transducer for simultaneously measuring a force that can be both dynamic and static includes at least one piezoelectric transducer element having element surfaces on which the force generates electrical polarization charges proportional to a magnitude of the force. The measurement transducer includes a resonator element which can be excited to at least one resonance frequency and undergoes a transverse expansion from the action of the force in a transverse direction to the force. The magnitude of the transverse expansion is proportional to the magnitude of the force and causes in the resonance frequency a change that is a function of the force.

    MEASUREMENT TRANSDUCER FOR SIMULTANEOUSLY MEASURING A FORCE THAT CAN BE BOTH DYNAMIC AND STATIC

    公开(公告)号:US20200271531A1

    公开(公告)日:2020-08-27

    申请号:US16462097

    申请日:2017-10-05

    Abstract: A measurement transducer for simultaneously measuring a force that can be both dynamic and static includes at least one piezoelectric transducer element having element surfaces on which the force generates electrical polarization charges proportional to a magnitude of the force. The measurement transducer includes a resonator element which can be excited to at least one resonance frequency and undergoes a transverse expansion from the action of the force in a transverse direction to the force. The magnitude of the transverse expansion is proportional to the magnitude of the force and causes in the resonance frequency a change that is a function of the force.

    ELECTRONIC CIRCUIT FOR A WEIGHT-IN-MOTION SENSOR
    9.
    发明申请
    ELECTRONIC CIRCUIT FOR A WEIGHT-IN-MOTION SENSOR 有权
    重量运动传感器的电子电路

    公开(公告)号:US20150042304A1

    公开(公告)日:2015-02-12

    申请号:US14385587

    申请日:2013-03-26

    Abstract: An electronic circuit that changes a charge signal into a voltage signal within a sensor suitable for direct installation in a roadway can be connected to two single-core cables that need not be highly insulating yet can realize the required power supply of the electronics. The circuit includes an integrated impedance converter (IEPE) at the output to a two-core cable and a charge amplifier with an IC1 that has two inputs. A capacitor Cc is connected in series to the signal output of the sensor at one input of the IC1. A Zener diode D is arranged between the ground output of the sensor and the second input of the IC1 and can be supplied with power by a resistor R1 in conjunction with a power supply arranged on the output side in order to adapt the potential at the second input of the IC1.

    Abstract translation: 将电荷信号改变成适于直接安装在道路中的传感器内的电压信号的电子电路可以连接到两个不需要高度绝缘的单芯电缆,而可实现电子设备所需的电源。 该电路包括在两芯电缆的输出端的集成阻抗转换器(IEPE)和具有两个输入的IC1的电荷放大器。 在IC1的一个输入处,电容器Cc与传感器的信号输出串联连接。 一个齐纳二极管D配置在传感器的接地输出端和IC1的第二个输入端之间,并且可以通过一个电阻器R1与布置在输出端的电源一起供电,以便调整第二个电位 输入IC1。

    Measurement transducer for measuring a force

    公开(公告)号:US11022509B2

    公开(公告)日:2021-06-01

    申请号:US16462117

    申请日:2017-10-05

    Abstract: A measurement transducer for measuring a force includes a resonator element, which can be excited to at least one resonance frequency, and at least one force application element on which the force is applied and which transmits the force to the resonator element. The force application element is a hollow body defining a top surface, a lateral surface and a cavity. The top and lateral surfaces are mechanically connected and enclose the cavity, which contains the resonator element that is mechanically connected to the lateral surface. The lateral surface defines at least one recessed area that extends into the cavity and prevents transmission of the force from the top surface. The lateral surface defines at least one non-recessed area that transmits the force from the top surface.

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