公开(公告)号：US11217416B2

公开(公告)日：2022-01-04

申请号：US17029501

申请日：2020-09-23

Applicant: KLA CORPORATION

Inventor： Sergei Belousov ,  Andrey Knizhnik ,  Inna M. Iskandarova ,  Boris Potapkin ,  Katerina Ioakeimidi ,  Gildardo R. Delgado ,  Frances Hill ,  Gary V. Lopez Lopez ,  Miguel Gonzalez

IPC: H01J1/34 ,  G02B5/00

Abstract: A photocathode emitter includes a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure array is configured to operate at a wavelength from 193 nm to 430 nm. The plasmonic structure array can be made of aluminum. An electron beam can be generated from a light beam directed at the plasmonic structure array of the photocathode emitter.

公开(公告)号：US20210098223A1

公开(公告)日：2021-04-01

申请号：US17029501

申请日：2020-09-23

Applicant: KLA CORPORATION

Inventor： Sergei Belousov ,  Andrey Knizhnik ,  Inna M. Iskandarova ,  Boris Potapkin ,  Katerina Ioakeimidi ,  Gildardo R. Delgado ,  Frances Hill ,  Gary V. Lopez Lopez ,  Miguel Gonzalez

IPC: H01J1/34 ,  G02B5/00

Abstract: A photocathode emitter includes a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure array is configured to operate at a wavelength from 193 nm to 430 nm. The plasmonic structure array can be made of aluminum. An electron beam can be generated from a light beam directed at the plasmonic structure array of the photocathode emitter.