公开(公告)号：US11181484B1

公开(公告)日：2021-11-23

申请号：US16882603

申请日：2020-05-25

Applicant: KLA CORPORATION

Inventor： Zhiwei Xu ,  Bret Whiteside ,  Steve Yifeng Cui ,  Stephen Biellak

IPC: G01N21/88 ,  G01N21/95 ,  H01L21/67

Abstract: Systems, methods, and apparatuses are disclosed herein for directing, using an optical arrangement including one or more lenses, a main beam and a leading beam toward a specimen such that the main beam is incident on the specimen at a main beam incidence and the leading beam is incident on the specimen at a leading beam incidence. The main beam intensity is greater than a leading beam intensity of the leading beam. A TDI sensor receives electromagnetic radiation from the leading beam incidence, thereby generating a first accumulated charge portion, and receives electromagnetic radiation from the main beam incidence, thereby generating a second accumulated charge portion. A processor maps the first accumulated charge portion to a first FOV, thereby yielding leading beam data, and maps the second accumulated charge portion to a second FOV, thereby yielding main beam data.