公开(公告)号：US11374375B2

公开(公告)日：2022-06-28

申请号：US16988443

申请日：2020-08-07

Applicant: KLA Corporation

Inventor： Mandar Paranjape ,  Steve Yifeng Cui ,  Anatoly Romanovsky ,  Million Daniel ,  Nadine Asenbaum-Doerre ,  Jeff Chen

IPC: H01S3/10 ,  H01S3/00 ,  H01S3/106 ,  G02F1/33 ,  H01S3/08 ,  G02B26/08

Abstract: A laser-beam power-modulation system includes an acousto-optic modulator (AOM) to receive a laser beam and separate the laser beam into a primary beam and a plurality of diffracted beams based on an input signal. The power of the primary beam depends on the input signal. The system also includes a slit to transmit the primary beam and dump the plurality of diffracted beams, a controller to generate a control signal based at least in part on feedback indicative of the power of the primary beam or the power of a beam generated using the primary beam, and a driver to generate the input signal based at least in part on the control signal.

公开(公告)号：US11181484B1

公开(公告)日：2021-11-23

申请号：US16882603

申请日：2020-05-25

Applicant: KLA CORPORATION

Inventor： Zhiwei Xu ,  Bret Whiteside ,  Steve Yifeng Cui ,  Stephen Biellak

IPC: G01N21/88 ,  G01N21/95 ,  H01L21/67

Abstract: Systems, methods, and apparatuses are disclosed herein for directing, using an optical arrangement including one or more lenses, a main beam and a leading beam toward a specimen such that the main beam is incident on the specimen at a main beam incidence and the leading beam is incident on the specimen at a leading beam incidence. The main beam intensity is greater than a leading beam intensity of the leading beam. A TDI sensor receives electromagnetic radiation from the leading beam incidence, thereby generating a first accumulated charge portion, and receives electromagnetic radiation from the main beam incidence, thereby generating a second accumulated charge portion. A processor maps the first accumulated charge portion to a first FOV, thereby yielding leading beam data, and maps the second accumulated charge portion to a second FOV, thereby yielding main beam data.

公开(公告)号：US20210050700A1

公开(公告)日：2021-02-18

申请号：US16988443

申请日：2020-08-07

Applicant: KLA Corporation

Inventor： Mandar Paranjape ,  Steve Yifeng Cui ,  Anatoly Romanovsky ,  Million Daniel ,  Nadine Asenbaum-Doerre ,  Jeff Chen

IPC: H01S3/106 ,  G02B26/08 ,  H01S3/08 ,  G02F1/33

Abstract: A laser-beam power-modulation system includes an acousto-optic modulator (AOM) to receive a laser beam and separate the laser beam into a primary beam and a plurality of diffracted beams based on an input signal. The power of the primary beam depends on the input signal. The system also includes a slit to transmit the primary beam and dump the plurality of diffracted beams, a controller to generate a control signal based at least in part on feedback indicative of the power of the primary beam or the power of a beam generated using the primary beam, and a driver to generate the input signal based at least in part on the control signal.