公开(公告)号：US20210041689A1

公开(公告)日：2021-02-11

申请号：US16533366

申请日：2019-08-06

Applicant: KLA Corporation

Inventor： David Jalil Zare ,  Eduardo Soto ,  I-Fan Wu ,  Joseph Walsh ,  Kent McKernan ,  Joseph Armstrong ,  Christopher Davis ,  Garry Rose ,  Damon Kvamme ,  Bernd Burfeindt ,  Ali Ehsani

IPC: G02B27/00

Abstract: An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.

公开(公告)号：US11624904B2

公开(公告)日：2023-04-11

申请号：US16533366

申请日：2019-08-06

Applicant: KLA Corporation

Inventor： David Jalil Zare ,  Eduardo Soto ,  I-Fan Wu ,  Joseph Walsh ,  Kent McKernan ,  Joseph Armstrong ,  Christopher Davis ,  Garry Rose ,  Damon Kvamme ,  Bernd Burfeindt ,  Ali Ehsani

IPC: G02B27/00 ,  H01S3/036 ,  G01N21/15 ,  H01L21/66

Abstract: An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.