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公开(公告)号：US20230191461A1
公开(公告)日：2023-06-22
申请号：US18078913
申请日：2022-12-09
Applicant: KLA Corporation
Inventor： Jiulong Sun , Eric Jiang , Ali Ehsani , Garry Rose , Boyd Taylor
CPC classification number: B08B7/0021 , C11D7/16 , C11D7/50 , C11D7/3209 , C11D11/0047 , H01L21/02101
Abstract: To clean components in semiconductor manufacturing equipment, such as an optical system or an electron beam system, a component is heated in a chamber. A supercritical fluid formulation is applied to the component in the chamber, which removes molecular and/or particulate contaminants. The supercritical fluid formulation can include one or more of carbon dioxide, water, HCF, alkane, alkene, nitrous oxide, methanol, ethanol, or acetone.
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公开(公告)号：US20210041689A1
公开(公告)日：2021-02-11
申请号：US16533366
申请日：2019-08-06
Applicant: KLA Corporation
Inventor： David Jalil Zare , Eduardo Soto , I-Fan Wu , Joseph Walsh , Kent McKernan , Joseph Armstrong , Christopher Davis , Garry Rose , Damon Kvamme , Bernd Burfeindt , Ali Ehsani
IPC: G02B27/00
Abstract: An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.
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公开(公告)号：US11624904B2
公开(公告)日：2023-04-11
申请号：US16533366
申请日：2019-08-06
Applicant: KLA Corporation
Inventor： David Jalil Zare , Eduardo Soto , I-Fan Wu , Joseph Walsh , Kent McKernan , Joseph Armstrong , Christopher Davis , Garry Rose , Damon Kvamme , Bernd Burfeindt , Ali Ehsani
Abstract: An enclosure surrounding the optical component can be connected with a vapor source. The vapor source can provide a vapor to the enclosure with a vapor level from 500 ppm to 15000 ppm. The concentration of vapor in the enclosure can increase the lifespan of the optical component in the enclosure.
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