公开(公告)号：US20220406553A1

公开(公告)日：2022-12-22

申请号：US17837889

申请日：2022-06-10

Applicant: KLA Corporation

Inventor： Mark S. Wang ,  Joshua Wittenberg

IPC: H01J9/26 ,  H01J61/54 ,  H01J9/24

Abstract: A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.

公开(公告)号：US11923185B2

公开(公告)日：2024-03-05

申请号：US17837889

申请日：2022-06-10

Applicant: KLA Corporation

Inventor： Mark S. Wang ,  Joshua Wittenberg

IPC: H01J9/26 ,  H01J9/24 ,  H01J61/54

CPC classification number: H01J9/266 ,  H01J9/247 ,  H01J61/54

Abstract: A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.

公开(公告)号：US11637008B1

公开(公告)日：2023-04-25

申请号：US17890813

申请日：2022-08-18

Applicant: KLA Corporation

Inventor： Sumeet Kumar ,  Joshua Wittenberg ,  Mark S. Wang ,  Rajkeshar Singh ,  Yoshio Kagebayashi ,  Shinichiro Nozaki

IPC: H01H1/24 ,  H01J65/04 ,  H01J61/02 ,  G01N21/21

Abstract: A plasma lamp for use in a broadband plasma source of an inspection tool is disclosed. The plasma lamp includes a plasma bulb configured to contain a gas and generate a plasma within the plasma bulb. The plasma bulb is formed from a material at least partially transparent to illumination from a pump laser and at least a portion of broadband radiation emitted by the plasma. The plasma bulb includes a conical pocket. The conical pocket is configured to disrupt a plume rising from the plasma.