公开(公告)号：US20220252512A1

公开(公告)日：2022-08-11

申请号：US17568995

申请日：2022-01-05

Applicant: KLA Corporation

Inventor： Xiumei Liu ,  Mark S. Wang

IPC: G01N21/47 ,  G01B11/27 ,  G01B21/04 ,  G01N21/17

Abstract: An imaging system may include an imaging metrology tool with an illumination source, one or more illumination optics to direct illumination from the illumination source to a sample, a detector, one or more collection optics to image the sample onto the detector; and one or more aberration-controlling components. The one or more aberration-controlling components may provide aberration correction for imaging the sample onto the detector according to one or more degrees of freedom, where the one or more degrees of freedom include at least a defocus of the imaging system, and where the one or more aberration-controlling components are integrated with at least one of the one or more illumination optics, the one or more collection optics, or the detector.

公开(公告)号：US20220406553A1

公开(公告)日：2022-12-22

申请号：US17837889

申请日：2022-06-10

Applicant: KLA Corporation

Inventor： Mark S. Wang ,  Joshua Wittenberg

IPC: H01J9/26 ,  H01J61/54 ,  H01J9/24

Abstract: A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.

公开(公告)号：US11923185B2

公开(公告)日：2024-03-05

申请号：US17837889

申请日：2022-06-10

Applicant: KLA Corporation

Inventor： Mark S. Wang ,  Joshua Wittenberg

IPC: H01J9/26 ,  H01J9/24 ,  H01J61/54

CPC classification number: H01J9/266 ,  H01J9/247 ,  H01J61/54

Abstract: A method of forming a high-pressure plasma lamp includes providing a lamp bulb. The lamp bulb includes a top channel and a bottom channel. The method includes inserting a top electrode element into the top channel of the lamp bulb. The method includes providing a glass tubular structure attached to a bottom electrode element. The method includes filling the lamp bulb with a liquified gas through the bottom channel of the lamp bulb. The method includes inserting the bottom electrode element and the glass tubular structure into the bottom channel.

公开(公告)号：US11637008B1

公开(公告)日：2023-04-25

申请号：US17890813

申请日：2022-08-18

Applicant: KLA Corporation

Inventor： Sumeet Kumar ,  Joshua Wittenberg ,  Mark S. Wang ,  Rajkeshar Singh ,  Yoshio Kagebayashi ,  Shinichiro Nozaki

IPC: H01H1/24 ,  H01J65/04 ,  H01J61/02 ,  G01N21/21

Abstract: A plasma lamp for use in a broadband plasma source of an inspection tool is disclosed. The plasma lamp includes a plasma bulb configured to contain a gas and generate a plasma within the plasma bulb. The plasma bulb is formed from a material at least partially transparent to illumination from a pump laser and at least a portion of broadband radiation emitted by the plasma. The plasma bulb includes a conical pocket. The conical pocket is configured to disrupt a plume rising from the plasma.