公开(公告)号：US11637008B1

公开(公告)日：2023-04-25

申请号：US17890813

申请日：2022-08-18

Applicant: KLA Corporation

Inventor： Sumeet Kumar ,  Joshua Wittenberg ,  Mark S. Wang ,  Rajkeshar Singh ,  Yoshio Kagebayashi ,  Shinichiro Nozaki

IPC: H01H1/24 ,  H01J65/04 ,  H01J61/02 ,  G01N21/21

Abstract: A plasma lamp for use in a broadband plasma source of an inspection tool is disclosed. The plasma lamp includes a plasma bulb configured to contain a gas and generate a plasma within the plasma bulb. The plasma bulb is formed from a material at least partially transparent to illumination from a pump laser and at least a portion of broadband radiation emitted by the plasma. The plasma bulb includes a conical pocket. The conical pocket is configured to disrupt a plume rising from the plasma.