公开(公告)号：US20240410909A1

公开(公告)日：2024-12-12

申请号：US18598906

申请日：2024-03-07

Applicant: KLA Corporation

Inventor： Mandar Paranjape ,  Ozarfar Gafarov

IPC: G01N35/00

Abstract: A sample contamination detection assembly may include an environmental sensor device configured to simultaneously measure two or more of humidity, temperature, or volatile organic content of one or more samples to determine chemical contamination. The assembly may include a funnel device. The funnel device may include a plurality of sidewalls that define two or more internal cavities. At least one sidewall may include an inlet opening connected to the inlet cavity and a first exhaust opening connected to the exhaust cavity, where the environmental sensor device may be arranged proximate to the inlet opening and the first exhaust opening. The funnel device may include a lip configured to direct handler air away from the environmental sensor device. The funnel device may include a slit arranged on at least one sidewall, where the slit may be configured to direct air from the one or more samples to the environmental sensor device.