公开(公告)号：US20210050700A1

公开(公告)日：2021-02-18

申请号：US16988443

申请日：2020-08-07

Applicant: KLA Corporation

Inventor： Mandar Paranjape ,  Steve Yifeng Cui ,  Anatoly Romanovsky ,  Million Daniel ,  Nadine Asenbaum-Doerre ,  Jeff Chen

IPC: H01S3/106 ,  G02B26/08 ,  H01S3/08 ,  G02F1/33

Abstract: A laser-beam power-modulation system includes an acousto-optic modulator (AOM) to receive a laser beam and separate the laser beam into a primary beam and a plurality of diffracted beams based on an input signal. The power of the primary beam depends on the input signal. The system also includes a slit to transmit the primary beam and dump the plurality of diffracted beams, a controller to generate a control signal based at least in part on feedback indicative of the power of the primary beam or the power of a beam generated using the primary beam, and a driver to generate the input signal based at least in part on the control signal.

公开(公告)号：US20220091047A1

公开(公告)日：2022-03-24

申请号：US17224913

申请日：2021-04-07

Applicant: KLA Corporation

Inventor： Anatoly Romanovsky ,  Zhiwei Xu ,  Yury Yuditsky ,  Yifeng Cui ,  Mandar Paranjape

IPC: G01N21/95 ,  H01L21/66 ,  G01N21/88

Abstract: A semiconductor wafer is inspected using a main laser beam and a secondary laser beam. The secondary laser beam leads the main laser beam and has lower power than the main laser beam. Using the secondary laser beam, a particle is detected on the semiconductor wafer having a size that satisfies a threshold. In response to detecting the particle, the power of the main laser beam and the power of the secondary laser beam are reduced. The particle passes through the main laser beam with the main laser beam at reduced power. After the particle has passed through the main laser beam with the main laser beam at the reduced power, the power of the main laser beam and the power of the secondary laser beam are restored in a controlled manner that is slower than a single step.

公开(公告)号：US20240410909A1

公开(公告)日：2024-12-12

申请号：US18598906

申请日：2024-03-07

Applicant: KLA Corporation

Inventor： Mandar Paranjape ,  Ozarfar Gafarov

IPC: G01N35/00

Abstract: A sample contamination detection assembly may include an environmental sensor device configured to simultaneously measure two or more of humidity, temperature, or volatile organic content of one or more samples to determine chemical contamination. The assembly may include a funnel device. The funnel device may include a plurality of sidewalls that define two or more internal cavities. At least one sidewall may include an inlet opening connected to the inlet cavity and a first exhaust opening connected to the exhaust cavity, where the environmental sensor device may be arranged proximate to the inlet opening and the first exhaust opening. The funnel device may include a lip configured to direct handler air away from the environmental sensor device. The funnel device may include a slit arranged on at least one sidewall, where the slit may be configured to direct air from the one or more samples to the environmental sensor device.

公开(公告)号：US11374375B2

公开(公告)日：2022-06-28

申请号：US16988443

申请日：2020-08-07

Applicant: KLA Corporation

Inventor： Mandar Paranjape ,  Steve Yifeng Cui ,  Anatoly Romanovsky ,  Million Daniel ,  Nadine Asenbaum-Doerre ,  Jeff Chen

IPC: H01S3/10 ,  H01S3/00 ,  H01S3/106 ,  G02F1/33 ,  H01S3/08 ,  G02B26/08

Abstract: A laser-beam power-modulation system includes an acousto-optic modulator (AOM) to receive a laser beam and separate the laser beam into a primary beam and a plurality of diffracted beams based on an input signal. The power of the primary beam depends on the input signal. The system also includes a slit to transmit the primary beam and dump the plurality of diffracted beams, a controller to generate a control signal based at least in part on feedback indicative of the power of the primary beam or the power of a beam generated using the primary beam, and a driver to generate the input signal based at least in part on the control signal.