公开(公告)号：US20240280828A1

公开(公告)日：2024-08-22

申请号：US18372663

申请日：2023-09-25

Applicant: KLA Corporation

Inventor： Haifeng Huang ,  Mitchell Lindsay ,  Eric Vella ,  Thomas Redding

IPC: G02B27/14 ,  G01N21/88

CPC classification number: G02B27/144 ,  G01N21/8806 ,  G01N21/9501

Abstract: A non-polarizing beam splitter can be a rectangular cuboid. A diagonal surface in the beam splitter extends from a corner between the first surface and the second surface at a 45° angle to a point on the third surface or the fourth surface. A beam of light is split into a transmitted beam and a reflected beam using the non-polarizing beam splitter.