公开(公告)号：US12092814B2

公开(公告)日：2024-09-17

申请号：US17574157

申请日：2022-01-12

Applicant: KLA Corporation

Inventor： Haifeng Huang ,  Rui-Fang Shi ,  Joseph Walsh ,  Mitchell Lindsay ,  Eric Vella

IPC: G02B27/00 ,  G02B27/58

CPC classification number: G02B27/0068 ,  G02B27/58

Abstract: An optical system with aberration correction is disclosed. The optical system may include an illumination source. The optical system may include a detector. The optical system may include one or more collection optics configured to image a sample onto the detector based on illumination from the illumination source. The optical system may include two or more aberration correction plates located in one or more pupil planes of the one or more collection optics. The two or more aberration correction plates may provide at least partial correction of two or more linearly-independent aberration terms. Any particular one of the two or more aberration correction plates may have a spatially-varying thickness profile providing a selected amount of correction for a single particular aberration term of the two or more linearly-independent aberration terms.

公开(公告)号：US20240280828A1

公开(公告)日：2024-08-22

申请号：US18372663

申请日：2023-09-25

Applicant: KLA Corporation

Inventor： Haifeng Huang ,  Mitchell Lindsay ,  Eric Vella ,  Thomas Redding

IPC: G02B27/14 ,  G01N21/88

CPC classification number: G02B27/144 ,  G01N21/8806 ,  G01N21/9501

Abstract: A non-polarizing beam splitter can be a rectangular cuboid. A diagonal surface in the beam splitter extends from a corner between the first surface and the second surface at a 45° angle to a point on the third surface or the fourth surface. A beam of light is split into a transmitted beam and a reflected beam using the non-polarizing beam splitter.

公开(公告)号：US20220244530A1

公开(公告)日：2022-08-04

申请号：US17574157

申请日：2022-01-12

Applicant: KLA Corporation

Inventor： Haifeng Huang ,  Rui-Fang Shi ,  Joseph Walsh ,  Mitchell Lindsay ,  Eric Vella

IPC: G02B27/00 ,  G02B27/58

Abstract: An optical system with aberration correction is disclosed. The optical system may include an illumination source. The optical system may include a detector. The optical system may include one or more collection optics configured to image a sample onto the detector based on illumination from the illumination source. The optical system may include two or more aberration correction plates located in one or more pupil planes of the one or more collection optics. The two or more aberration correction plates may provide at least partial correction of two or more linearly-independent aberration terms. Any particular one of the two or more aberration correction plates may have a spatially-varying thickness profile providing a selected amount of correction for a single particular aberration term of the two or more linearly-independent aberration terms.