公开(公告)号：US10522426B1

公开(公告)日：2019-12-31

申请号：US16271506

申请日：2019-02-08

Applicant: KLA-TENCOR CORPORATION

Inventor： Hongxing Yuan ,  Dimitry Pokras ,  William VanHoomissen ,  Douglas Chan

IPC: G01N21/00 ,  H01L21/66 ,  G01B11/30

Abstract: This system and method minimize an effect of haze to signal-to-noise ratio and compensate for haze on the haze map. A first mask with a first aperture is disposed along the path of the light beam between a light source and a collector. A first actuator moves the first mask along a tangential direction. A second mask with a second aperture is disposed along the path of the light beam between the first mask and the collector. A second actuator moves the second mask along a radial direction perpendicular to the tangential direction. The first mask and the second mask are independently movable along the tangential direction and the radial direction using the first actuator and the second actuator.