公开(公告)号：US20160048969A1

公开(公告)日：2016-02-18

申请号：US14926984

申请日：2015-10-29

Applicant: KLA-TENCOR CORPORATION

Inventor： Guoheng ZHAO ,  Stanley E. Stokowski ,  Andrew HILL ,  Johan DE GREEVE ,  Maarten VAN DER BURGT ,  Karel VAN GILS

IPC: G06T7/00 ,  H04N5/372

CPC classification number: G06T7/586 ,  G01B11/0608 ,  G01B11/2513 ,  G01B11/2522 ,  G06T2207/10052 ,  G06T2207/20208 ,  H04N5/37206

Abstract: The invention relates to an image acquisition system and an image acquisition method, as well as to an inspection system having at least one such image acquisition system. A projector projects a pattern on a surface of a sample, a camera records light intensity information from within at least two detection fields defined by the camera on the surface of the sample. A relative motion between the sample on the one hand and the camera and projector on the other hand is generated. From the acquired at least one image a height profile of the surface of the sample may be inferred. The pattern may comprise a number of sub-patterns related to each other by a phase shift. Alternatively, the pattern may be a fringe pattern.

Abstract translation: 本发明涉及一种图像获取系统和图像获取方法，以及具有至少一个这样的图像采集系统的检查系统。 投影仪在样品的表面上投影图案，照相机记录来自样品表面上由照相机限定的至少两个检测区域内的光强度信息。 另一方面，生成样品与相机和投影仪之间的相对运动。 从所获取的至少一个图像可以推断出样品表面的高度分布。 该图案可以包括通过相移彼此相关的多个子图案。 或者，图案可以是条纹图案。