公开(公告)号：US09776334B2

公开(公告)日：2017-10-03

申请号：US14243632

申请日：2014-04-02

Applicant: KLA-Tencor Corporation

Inventor： Bert Vangilbergen ,  Erik De Block ,  Jimmy Vermeulen ,  KW Cheung ,  KC Leung ,  Bruno Accou ,  Carl Truyens ,  Karel Van Gils

IPC: B25J15/00

CPC classification number: B25J15/0061

Abstract: An apparatus for automatic pitch conversion for pick and place heads, comprising at least one auto pitch station for adjusting a pitch in a X-coordinate direction and/or adjusting a pitch in a Y-coordinate direction of pickers/grippers of a pick and place heads; a first actuator, operated by a motor gear assembly of the at least one auto pitch station, wherein the first actuator changes the pitch in the X-coordinate direction distance between rows of pickers/grippers of the respective pick and place head; and a second actuator operated by the same motor gear assembly, wherein the second actuator changes the pitch in the Y-coordinate direction between the pickers/grippers within a row of the respective pick and place head. A method for automatic pitch conversion of pick and place heads and a pick and place head and a pick and place device.

公开(公告)号：US20140271084A1

公开(公告)日：2014-09-18

申请号：US14243632

申请日：2014-04-02

Applicant: KLA-Tencor Corporation

Inventor： Bert Vangilbergen ,  Erik De Block ,  Jimmy Vermeulen ,  KW Cheung ,  KC Leung ,  Bruno Accou ,  Carl Truyens ,  Karel Van Gils

IPC: B25J15/00 ,  B25J11/00

CPC classification number: B25J15/0061

Abstract: An apparatus for automatic pitch conversion for pick and place heads, comprising at least one auto pitch station for adjusting a pitch in a X-coordinate direction and/or adjusting a pitch in a Y-coordinate direction of pickers/grippers of a pick and place heads; a first actuator, operated by a motor gear assembly of the at least one auto pitch station, wherein the first actuator changes the pitch in the X-coordinate direction distance between rows of pickers/grippers of the respective pick and place head; and a second actuator operated by the same motor gear assembly, wherein the second actuator changes the pitch in the Y-coordinate direction between the pickers/grippers within a row of the respective pick and place head. A method for automatic pitch conversion of pick and place heads and a pick and place head and a pick and place device.

Abstract translation: 一种用于拾放头的自动俯仰变换的装置，包括至少一个用于调整X坐标方向的俯仰和/或调整拾取器和拾取器的拾取器/夹持器的Y坐标方向的俯仰的自动俯仰站 头 由所述至少一个自动俯仰站的电动机齿轮组件操作的第一致动器，其中所述第一致动器改变所述拾取和放置头部的拾取器/夹持器行之间的X坐标方向距离处的间距; 以及由同一个电动机齿轮组件操作的第二致动器，其中第二致动器改变在相应的拾放头的一排内的拾取器/夹持器之间的Y坐标方向上的间距。 拾放头自动俯仰转换的方法和拾放头和拾放装置。

公开(公告)号：US09886764B2

公开(公告)日：2018-02-06

申请号：US14926984

申请日：2015-10-29

Applicant: KLA-TENCOR CORPORATION

Inventor： Guoheng Zhao ,  Stanley E. Stokowski ,  Andrew Hill ,  Johan De Greeve ,  Maarten Van Der Burgt ,  Karel Van Gils

IPC: G06T7/00 ,  H04N5/372 ,  G01B11/06 ,  G01B11/25 ,  G06T7/586

CPC classification number: G06T7/586 ,  G01B11/0608 ,  G01B11/2513 ,  G01B11/2522 ,  G06T2207/10052 ,  G06T2207/20208 ,  H04N5/37206

Abstract: The invention relates to an image acquisition system and an image acquisition method, as well as to an inspection system having at least one such image acquisition system. A projector projects a pattern on a surface of a sample, a camera records light intensity information from within at least two detection fields defined by the camera on the surface of the sample. A relative motion between the sample on the one hand and the camera and projector on the other hand is generated. From the acquired at least one image a height profile of the surface of the sample may be inferred. The pattern may comprise a number of sub-patterns related to each other by a phase shift. Alternatively, the pattern may be a fringe pattern.