公开(公告)号：US09184034B2

公开(公告)日：2015-11-10

申请号：US13788945

申请日：2013-03-07

Applicant: KLA-Tencor Corporation

Inventor： Michael Eaton

IPC: G01N21/00 ,  H01J43/28 ,  G01N21/88 ,  G01N21/95

CPC classification number: H01J43/28 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8822

Abstract: The disclosure is directed to a photomultiplier tube with extended dynamic range. According to various embodiments, a repulsive electric field is introduced between a photocathode and a plurality of dynodes in order to repel or block low-energy electrons from reaching and being multiplied by the dynodes. As a result, time intervals between current peaks and drops may be decreased because the photomultiplier current will be primarily affected by high-energy electrons emitted by the photocathode in response to incident illumination versus low-energy electrons, some of which may result from dangling bonds or slow surface states after illumination no longer impinges the photocathode. Dynamic range and optical responsiveness of the photomultiplier tube are increased accordingly.

Abstract translation: 本公开涉及具有扩展动态范围的光电倍增管。 根据各种实施例，在光电阴极和多个倍增电极之间引入排斥电场，以排斥或阻止低能电子达到和乘以倍增电极。 结果，电流峰值和电压下降之间的时间间隔可能会降低，因为光电倍增管电流将主要受到光电阴极响应于入射照射与低能电子发射的高能电子的影响，其中一些可能由悬挂键 或照明后的表面状态不再影响光电阴极。 光电倍增管的动态范围和光响应性相应增加。

公开(公告)号：US20130242291A1

公开(公告)日：2013-09-19

申请号：US13788945

申请日：2013-03-07

Applicant: KLA-TENCOR CORPORATION

Inventor： Michael Eaton

IPC: H01J43/28 ,  G01N21/88

CPC classification number: H01J43/28 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8822

Abstract: The disclosure is directed to a photomultiplier tube with extended dynamic range. According to various embodiments, a repulsive electric field is introduced between a photocathode and a plurality of dynodes in order to repel or block low-energy electrons from reaching and being multiplied by the dynodes. As a result, time intervals between current peaks and drops may be decreased because the photomultiplier current will be primarily affected by high-energy electrons emitted by the photocathode in response to incident illumination versus low-energy electrons, some of which may result from dangling bonds or slow surface states after illumination no longer impinges the photocathode. Dynamic range and optical responsiveness of the photomultiplier tube are increased accordingly.

Abstract translation: 本公开涉及具有扩展动态范围的光电倍增管。 根据各种实施例，在光电阴极和多个倍增电极之间引入排斥电场，以排斥或阻止低能电子达到和乘以倍增电极。 结果，电流峰值和电压下降之间的时间间隔可能会降低，因为光电倍增管电流将主要受到光电阴极响应于入射照射与低能电子发射的高能电子的影响，其中一些可能由悬挂键 或照明后的表面状态不再影响光电阴极。 光电倍增管的动态范围和光响应性相应增加。