公开(公告)号：US20160188784A1

公开(公告)日：2016-06-30

申请号：US14983452

申请日：2015-12-29

Applicant: KLA-Tencor Corporation

Inventor： Santosh Bhattacharyya ,  Bjoern Braeuer ,  Lisheng Gao

IPC: G06F17/50

CPC classification number: G06F17/5081 ,  G03F7/70616

Abstract: Methods and systems for determining a position of output generated by an inspection subsystem in design data space are provided. One method includes selecting one or more alignment targets from a design for a specimen. At least a portion of the one or more alignment targets include built in targets included in the design for a purpose other than alignment of inspection results to design data space. At least the portion of the one or more alignment targets does not include one or more individual device features. One or more images for the alignment target(s) and output generated by the inspection subsystem at the position(s) of the alignment target(s) may then be used to determine design data space positions of other output generated by the inspection subsystem in a variety of ways described herein.

Abstract translation: 提供了用于确定由检查子系统在设计数据空间中产生的输出位置的方法和系统。 一种方法包括从样本的设计中选择一个或多个对准目标。 一个或多个对准目标的至少一部分包括设计中包括的内置目标，用于除了检查结果对齐以设计数据空间之外的目的。 至少一个或多个对准目标的部分不包括一个或多个单独的装置特征。 然后可以使用用于对准目标的一个或多个图像和由检查子系统在对准目标的位置产生的输出来确定由检查子系统生成的其他输出的设计数据空间位置 本文描述的各种方式。