公开(公告)号：US20160027164A1

公开(公告)日：2016-01-28

申请号：US14804102

申请日：2015-07-20

Applicant: KLA-Tencor Corporation

Inventor： Brian Duffy ,  Michael Lennek ,  ChangHo Lee

IPC: G06T7/00 ,  G06T5/50

CPC classification number: G06T7/001 ,  G06T5/50 ,  G06T7/32 ,  G06T2207/10004 ,  G06T2207/20164 ,  G06T2207/30148

Abstract: Methods and systems for determining coordinates for an area of interest on a specimen are provided. One system includes one or more computer subsystems configured for, for an area of interest on a specimen being inspected, identifying one or more targets located closest to the area of interest. The computer subsystem(s) are also configured for aligning one or more images for the one or more targets to a reference for the specimen. The image(s) for the target(s) and an image for the area of interest are acquired by an inspection subsystem during inspection of the specimen. The computer subsystem(s) are further configured for determining an offset between the image(s) for the target(s) and the reference based on results of the aligning and determining modified coordinates of the area of interest based on the offset and coordinates of the area of interest reported by the inspection subsystem.

Abstract translation: 提供了用于确定样本上感兴趣区域的坐标的方法和系统。 一个系统包括一个或多个计算机子系统，其被配置用于针对被检查的样本上的感兴趣区域，识别位于最靠近感兴趣区域的一个或多个目标。 计算机子系统还被配置为将一个或多个目标的一个或多个图像对准样本的参考。 用于目标的图像和感兴趣区域的图像在检查样本期间由检查子系统获取。 计算机子系统还被配置为基于对准的结果和基于所关注区域的偏移和坐标来确定感兴趣区域的修改坐标来确定用于目标的图像和参考图像之间的偏移 检查子系统报告的感兴趣区域。

公开(公告)号：US10127653B2

公开(公告)日：2018-11-13

申请号：US14804102

申请日：2015-07-20

Applicant: KLA-Tencor Corporation

Inventor： Brian Duffy ,  Michael Lennek ,  ChangHo Lee

IPC: G06T7/00 ,  G06T5/50 ,  G06T7/32

Abstract: Methods and systems for determining coordinates for an area of interest on a specimen are provided. One system includes one or more computer subsystems configured for, for an area of interest on a specimen being inspected, identifying one or more targets located closest to the area of interest. The computer subsystem(s) are also configured for aligning one or more images for the one or more targets to a reference for the specimen. The image(s) for the target(s) and an image for the area of interest are acquired by an inspection subsystem during inspection of the specimen. The computer subsystem(s) are further configured for determining an offset between the image(s) for the target(s) and the reference based on results of the aligning and determining modified coordinates of the area of interest based on the offset and coordinates of the area of interest reported by the inspection subsystem.