公开(公告)号：US11862522B2

公开(公告)日：2024-01-02

申请号：US17179379

申请日：2021-02-18

申请人： KLA-Tencor Corporation

发明人： Barak Bringoltz ,  Evgeni Gurevich ,  Ido Adam ,  Yoel Feler ,  Dror Alumot ,  Yuval Lamhot ,  Noga Sella ,  Yaron De Leeuw ,  Tal Yaziv ,  Eltsafon Ashwal-Island ,  Lilach Saltoun ,  Tom Leviant

IPC分类号： H01L21/66 ,  G03F7/00 ,  G03F9/00

CPC分类号： H01L22/20 ,  G03F7/70633 ,  G03F9/7003 ,  H01L22/12

摘要： Methods, metrology modules and target designs are provided, which improve the accuracy of metrology measurements. Methods provide flexible handling of multiple measurement recipes and setups and enable relating them to landscape features that indicate their relation to resonance regions and to flat regions. Clustering of recipes, self-consistency tests, common processing of aggregated measurements, noise reduction, cluster analysis, detailed analysis of the landscape and targets with skewed cells are employed separately or in combination to provide cumulative improvements of measurement accuracy.

公开(公告)号：US20210175132A1

公开(公告)日：2021-06-10

申请号：US17179379

申请日：2021-02-18

申请人： KLA-Tencor Corporation

发明人： Barak Bringoltz ,  Evgeni Gurevich ,  Ido Adam ,  Yoel Feler ,  Dror Alumot ,  Yuval Lamhot ,  Noga Sella ,  Yaron De Leeuw ,  Tal Yaziv ,  Eltsafon Ashwal-Island ,  Lilach Saltoun ,  Tom Leviant

IPC分类号： H01L21/66 ,  G06F16/28 ,  G03F9/00 ,  G03F7/20

摘要： Methods, metrology modules and target designs are provided, which improve the accuracy of metrology measurements. Methods provide flexible handling of multiple measurement recipes and setups and enable relating them to landscape features that indicate their relation to resonance regions and to flat regions. Clustering of recipes, self-consistency tests, common processing of aggregated measurements, noise reduction, cluster analysis, detailed analysis of the landscape and targets with skewed cells are employed separately or in combination to provide cumulative improvements of measurement accuracy.