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1.发明申请APPARATUS AND METHOD FOR CONTROLLED DEPOSITION OF AEROSOLIZED PARTICLES ONTO A SUBSTRATE 审中-公开控制沉积在底物上的颗粒的装置和方法公开(公告)号：US20140308456A1
公开(公告)日：2014-10-16
申请号：US14247197
申请日：2014-04-07
Applicant: KLA-Tencor Corporation
Inventor： Yu Guan , Francisco Kole
CPC classification number: B05B5/00 , B05B5/0255 , B05B5/0533 , G01N15/0227 , G01N2001/2893 , G01N2015/0046 , H01J2237/2826
Abstract: An apparatus for the controlled deposition of particles onto a film or a substrate, including: a frame arranged to support a film or a substrate having first and second surfaces facing in first and second opposite directions, respectively; a nozzle arranged to emit a stream of particles charged with a first polarity toward the first surface; and an electrode: charged with a second polarity, opposite the first polarity, and located adjacent the second surface; and arranged to attract the stream of particles to a region of the first surface. A line orthogonal to the first surface passes through the region and the electrode.
Abstract translation: 一种用于将颗粒受控沉积到膜或基底上的装置，包括：框架，其被布置成支撑分别具有面向第一和第二相反方向的第一和第二表面的膜或基底; 喷嘴，布置成朝向第一表面发射带有第一极性的颗粒物流; 以及电极，充电具有与所述第一极性相反的第二极性，并且位于所述第二表面附近; 并布置成将颗粒流吸引到第一表面的区域。 与第一表面正交的线通过该区域和电极。
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2.发明授权Particle suspensions used as low-contrast standards for inspection of liquids 有权用作液体检查的低对比度标准的颗粒悬浮液公开(公告)号：US09562846B2
公开(公告)日：2017-02-07
申请号：US14324872
申请日：2014-07-07
Applicant: KLA-Tencor Corporation
Inventor： Francisco Kole , Johannes G. M. Christiaanse , Greg Kirk , Winfred Tee Chow
CPC classification number: G01N21/278 , G01N15/0227 , G01N15/06 , G01N15/0656 , G01N21/4785 , G01N2001/2893 , G01N2015/0065 , G01N2015/0294 , G01N2015/0687 , G01N2015/0693
Abstract: In certain embodiments, a method for validating the human visual inspection process or an optical analysis instrument for use with biological particles may include inspecting a standard particle solution using the optical analysis instrument. The standard particle solution may include a known concentration of standard particles suspended in solution with the standard particles having a defined size and shape distribution. The standard particles may have a refractive index that is substantially similar to a refractive index of the biological particles. The method may include assessing a concentration of standard particles in the standard particle solution from the inspection. The method may include assessing a difference between the assessed concentration of standard particles and the known concentration of standard particles. The method may include modifying one or more parameters of the optical analysis instrument based on the assessed difference between the concentrations. The method may include assessing a detection efficiency of the optical analysis instrument.
Abstract translation: 在某些实施例中，用于验证人类视觉检查过程的方法或用于生物颗粒的光学分析仪器可以包括使用光学分析仪器检查标准颗粒溶液。 标准颗粒溶液可以包括悬浮在溶液中的已知浓度的标准颗粒，其中标准颗粒具有确定的尺寸和形状分布。 标准颗粒可以具有基本上类似于生物颗粒的折射率的折射率。 该方法可以包括从检查中评估标准颗粒溶液中的标准颗粒的浓度。 该方法可以包括评估所评估的标准颗粒浓度与标准颗粒的已知浓度之间的差异。 该方法可以包括基于所评估的浓度差异修改光学分析仪器的一个或多个参数。 该方法可以包括评估光学分析仪器的检测效率。
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3.发明申请公开(公告)号：US20150015872A1
公开(公告)日：2015-01-15
申请号：US14324872
申请日：2014-07-07
Applicant: KLA-Tencor Corporation
Inventor： Francisco Kole , Johannes G. M. Christiaanse , Greg Kirk , Winfred Tee Chow
CPC classification number: G01N21/278 , G01N15/0227 , G01N15/06 , G01N15/0656 , G01N21/4785 , G01N2001/2893 , G01N2015/0065 , G01N2015/0294 , G01N2015/0687 , G01N2015/0693
Abstract: In certain embodiments, a method for validating the human visual inspection process or an optical analysis instrument for use with biological particles may include inspecting a standard particle solution using the optical analysis instrument. The standard particle solution may include a known concentration of standard particles suspended in solution with the standard particles having a defined size and shape distribution. The standard particles may have a refractive index that is substantially similar to a refractive index of the biological particles. The method may include assessing a concentration of standard particles in the standard particle solution from the inspection. The method may include assessing a difference between the assessed concentration of standard particles and the known concentration of standard particles. The method may include modifying one or more parameters of the optical analysis instrument based on the assessed difference between the concentrations. The method may include assessing a detection efficiency of the optical analysis instrument.
Abstract translation: 在某些实施例中，用于验证人类视觉检查过程的方法或用于生物颗粒的光学分析仪器可以包括使用光学分析仪器检查标准颗粒溶液。 标准颗粒溶液可以包括悬浮在溶液中的已知浓度的标准颗粒，其中标准颗粒具有确定的尺寸和形状分布。 标准颗粒可以具有基本上类似于生物颗粒的折射率的折射率。 该方法可以包括从检查中评估标准颗粒溶液中的标准颗粒的浓度。 该方法可以包括评估所评估的标准颗粒浓度与标准颗粒的已知浓度之间的差异。 该方法可以包括基于所评估的浓度差异修改光学分析仪器的一个或多个参数。 该方法可以包括评估光学分析仪器的检测效率。
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