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公开(公告)号：US09747518B2
公开(公告)日：2017-08-29
申请号：US14703546
申请日：2015-05-04
Applicant: KLA-Tencor Corporation
CPC classification number: G06K9/52 , G06K9/6221 , G06K2009/4666 , G06T1/20 , G06T7/001 , G06T2207/30148
Abstract: A method for selecting samples of reticle design data patterns in order to calibrate the parameters based on which the reference image used in a die-to-database reticle inspection method is rendered, the method comprising the steps of applying local binary pattern (LBP) analysis to a plurality of samples to obtain a p-dimensional vector output for each of the plurality of samples, clustering the q-D data points to M groups, selecting one sample from each clustered group, calculating evaluation scores for the samples selected, and, selecting a portion of the M samples on the representativeness score and the diversity score.
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2.发明申请AUTOMATIC CALIBRATION SAMPLE SELECTION FOR DIE-TO-DATABASE PHOTOMASK INSPECTION 有权自动校准样品选择用于数据库光电子检测公开(公告)号：US20150324664A1
公开(公告)日：2015-11-12
申请号：US14703546
申请日：2015-05-04
Applicant: KLA-Tencor Corporation
CPC classification number: G06K9/52 , G06K9/6221 , G06K2009/4666 , G06T1/20 , G06T7/001 , G06T2207/30148
Abstract: A method for selecting samples of reticle design data patterns in order to calibrate the parameters based on which the reference image used in a die-to-database reticle inspection method is rendered, the method comprising the steps of applying local binary pattern (LBP) analysis to a plurality of samples to obtain a p-dimensional vector output for each of the plurality of samples, clustering the q-D data points to M groups, selecting one sample from each clustered group, calculating evaluation scores for the samples selected, and, selecting a portion of the M samples on the representativeness score and the diversity score.
Abstract translation: 一种用于选择标线设计数据模式的样本的方法，以便根据该参数来校准参考图像，所述参数基于哪个参考图像被使用在模具到数据库的标线检查方法中，该方法包括以下步骤：应用局部二进制模式（LBP）分析 将多个样本中的每一个采样的p维向量输出进行聚类，将qD数据点聚类成M组，从每个聚类组中选择一个样本，计算所选样本的评价分数，并选择 M个样本的部分代表性评分和多样性分数。
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公开(公告)号：US09805462B2
公开(公告)日：2017-10-31
申请号：US15484017
申请日：2017-04-10
Applicant: KLA-Tencor Corporation
Inventor： Abdurrahman Sezginer , Gang Pan , Bing Li
CPC classification number: G06T7/001 , G01N21/9501 , G01N21/95607 , G01N2021/95676 , G01N2201/12 , G03F1/84 , G03F7/7065 , G06K9/6232 , G06K9/6252 , G06K9/6282 , G06N99/005 , G06T7/0008 , G06T2207/20081 , G06T2207/30148
Abstract: Apparatus and methods for inspecting a specimen are disclosed. An inspection tool is used at one or more operating modes to obtain images of a plurality of training regions of a specimen, and the training regions are identified as defect-free. Three or more basis training images are derived from the images of the training regions. A classifier is formed based on the three or more basis training images. The inspection system is used at the one or more operating modes to obtain images of a plurality of test regions of a specimen. Three or more basis test images are derived from to the test regions. The classifier is applied to the three or more basis test images to find defects in the test regions.
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Patent Agency Ranking
公开(公告)号：US20170221190A1
公开(公告)日：2017-08-03
申请号：US15484017
申请日：2017-04-10
Applicant: KLA-Tencor Corporation
Inventor： Abdurrahman Sezginer , Gang Pan , Bing Li
IPC: G06T7/00 , G01N21/956 , G06N99/00 , G01N21/95
CPC classification number: G06T7/001 , G01N21/9501 , G01N21/95607 , G01N2021/95676 , G01N2201/12 , G03F1/84 , G03F7/7065 , G06K9/6232 , G06K9/6252 , G06K9/6282 , G06N99/005 , G06T7/0008 , G06T2207/20081 , G06T2207/30148
Abstract: Apparatus and methods for inspecting a specimen are disclosed. An inspection tool is used at one or more operating modes to obtain images of a plurality of training regions of a specimen, and the training regions are identified as defect-free. Three or more basis training images are derived from the images of the training regions. A classifier is formed based on the three or more basis training images. The inspection system is used at the one or more operating modes to obtain images of a plurality of test regions of a specimen. Three or more basis test images are derived from to the test regions. The classifier is applied to the three or more basis test images to find defects in the test regions.
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公开(公告)号：US09652843B2
公开(公告)日：2017-05-16
申请号：US15221304
申请日：2016-07-27
Applicant: KLA-Tencor Corporation
Inventor： Abdurrahman Sezginer , Gang Pan , Bing Li
CPC classification number: G06T7/001 , G01N21/9501 , G01N21/95607 , G01N2021/95676 , G01N2201/12 , G03F1/84 , G03F7/7065 , G06K9/6232 , G06K9/6252 , G06K9/6282 , G06N99/005 , G06T7/0008 , G06T2207/20081 , G06T2207/30148
Abstract: Apparatus and methods for inspecting a specimen are disclosed. An inspection tool is used at one or more operating modes to obtain images of a plurality of training regions of a specimen, and the training regions are identified as defect-free. Three or more basis training images are derived from the images of the training regions. A classifier is formed based on the three or more basis training images. The inspection system is used at the one or more operating modes to obtain images of a plurality of test regions of a specimen. Three or more basis test images are derived from to the test regions. The classifier is applied to the three or more basis test images to find defects in the test regions.
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公开(公告)号：US20140341462A1
公开(公告)日：2014-11-20
申请号：US14274972
申请日：2014-05-12
Applicant: KLA-Tencor Corporation
Inventor： Abdurrahman Sezginer , Gang Pan , Bing Li
CPC classification number: G06T7/001 , G01N21/9501 , G01N21/95607 , G01N2021/95676 , G01N2201/12 , G03F1/84 , G03F7/7065 , G06K9/6232 , G06K9/6252 , G06K9/6282 , G06N99/005 , G06T7/0008 , G06T2207/20081 , G06T2207/30148
Abstract: Apparatus and methods for inspecting a photolithographic reticle are disclosed. A reticle inspection tool is used at one or more operating modes to obtain images of a plurality of training regions of a reticle, and the training regions are identified as defect-free. Three or more basis training images are derived from the images of the training regions. A classifier is formed based on the three or more basis training images. The inspection system is used at the one or more operating modes to obtain images of a plurality of test regions of a reticle. Three or more basis test images are derived from to the test regions. The classifier is applied to the three or more basis test images to find defects in the test regions.
Abstract translation: 公开了用于检查光刻掩模版的装置和方法。 在一种或多种操作模式下使用掩模版检查工具来获得掩模版的多个训练区域的图像，并且将训练区域识别为无缺陷。 从训练区域的图像导出三个或更多个基础训练图像。 基于三个或更多个基础训练图像形成分类器。 在一个或多个操作模式下使用检查系统以获得掩模版的多个测试区域的图像。 三个或更多个基础测试图像来自测试区域。 分类器应用于三个或更多个基础测试图像，以在测试区域中发现缺陷。
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公开(公告)号：US20160335753A1
公开(公告)日：2016-11-17
申请号：US15221304
申请日：2016-07-27
Applicant: KLA-Tencor Corporation
Inventor： Abdurrahman Sezginer , Gang Pan , Bing Li
CPC classification number: G06T7/001 , G01N21/9501 , G01N21/95607 , G01N2021/95676 , G01N2201/12 , G03F1/84 , G03F7/7065 , G06K9/6232 , G06K9/6252 , G06K9/6282 , G06N99/005 , G06T7/0008 , G06T2207/20081 , G06T2207/30148
Abstract: Apparatus and methods for inspecting a specimen are disclosed. An inspection tool is used at one or more operating modes to obtain images of a plurality of training regions of a specimen, and the training regions are identified as defect-free. Three or more basis training images are derived from the images of the training regions. A classifier is formed based on the three or more basis training images. The inspection system is used at the one or more operating modes to obtain images of a plurality of test regions of a specimen. Three or more basis test images are derived from to the test regions. The classifier is applied to the three or more basis test images to find defects in the test regions.
Abstract translation: 公开了用于检查试样的装置和方法。 以一种或多种操作模式使用检查工具来获得样本的多个训练区域的图像，并且训练区域被识别为无缺陷的。 从训练区域的图像导出三个或更多个基础训练图像。 基于三个或更多个基础训练图像形成分类器。 在一个或多个操作模式下使用检查系统以获得样本的多个测试区域的图像。 三个或更多个基础测试图像来自测试区域。 分类器应用于三个或更多个基础测试图像，以在测试区域中发现缺陷。
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公开(公告)号：US09430824B2
公开(公告)日：2016-08-30
申请号：US14274972
申请日：2014-05-12
Applicant: KLA-Tencor Corporation
Inventor： Abdurrahman Sezginer , Gang Pan , Bing Li
IPC: G06T7/00 , G01N21/956 , G06K9/62 , G03F7/20 , G03F1/84
CPC classification number: G06T7/001 , G01N21/9501 , G01N21/95607 , G01N2021/95676 , G01N2201/12 , G03F1/84 , G03F7/7065 , G06K9/6232 , G06K9/6252 , G06K9/6282 , G06N99/005 , G06T7/0008 , G06T2207/20081 , G06T2207/30148
Abstract: Apparatus and methods for inspecting a photolithographic reticle are disclosed. A reticle inspection tool is used at one or more operating modes to obtain images of a plurality of training regions of a reticle, and the training regions are identified as defect-free. Three or more basis training images are derived from the images of the training regions. A classifier is formed based on the three or more basis training images. The inspection system is used at the one or more operating modes to obtain images of a plurality of test regions of a reticle. Three or more basis test images are derived from to the test regions. The classifier is applied to the three or more basis test images to find defects in the test regions.
Abstract translation: 公开了用于检查光刻掩模版的装置和方法。 在一种或多种操作模式下使用掩模版检查工具来获得掩模版的多个训练区域的图像，并且将训练区域识别为无缺陷。 从训练区域的图像导出三个或更多个基础训练图像。 基于三个或更多个基础训练图像形成分类器。 在一个或多个操作模式下使用检查系统以获得掩模版的多个测试区域的图像。 三个或更多个基础测试图像来自测试区域。 分类器应用于三个或更多个基础测试图像，以在测试区域中发现缺陷。
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