公开(公告)号：US20160011110A1

公开(公告)日：2016-01-14

申请号：US14686308

申请日：2015-04-14

Applicant: KLA-Tencor Corporation

Inventor： Shinichi Kojima ,  Hamada Wahba ,  Michael R. Gluszczak ,  Joseph A. DiRegolo

IPC: G01N21/64 ,  H01J37/22 ,  H01J37/244

CPC classification number: G01N21/64 ,  H01J37/226 ,  H01J37/244 ,  H01J2237/043 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/24578

Abstract: An electron beam detection apparatus includes a first aperture element including a first set of apertures. The apparatus includes a second aperture element including a second set of apertures. The second set of apertures is arranged in a pattern corresponding with the pattern of the first plurality of apertures. The detection apparatus includes an electron-photon conversion element configured to receive electrons of the electron beam transmitted through the first and second aperture elements. The electron-photon conversion element is configured to generate photons in response to the received electrons. The detection apparatus includes an optical assembly including one or more optical elements. The detection apparatus includes a detector assembly. The optical elements of the optical assembly are configured to direct the generated photons from the electron-photon conversion system to the detector assembly.

Abstract translation: 电子束检测装置包括包括第一组孔的第一孔元件。 该装置包括第二孔元件，其包括第二组孔。 第二组孔被布置成与第一多个孔的图案对应的图案。 检测装置包括电子 - 光子转换元件，其被配置为接收通过第一和第二孔元件传输的电子束的电子。 电子 - 光子转换元件被配置为响应于所接收的电子产生光子。 检测装置包括包括一个或多个光学元件的光学组件。 检测装置包括检测器组件。 光学组件的光学元件被配置为将所产生的光子从电子 - 光子转换系统引导到检测器组件。

公开(公告)号：US09778186B2

公开(公告)日：2017-10-03

申请号：US14686308

申请日：2015-04-14

Applicant: KLA-Tencor Corporation

Inventor： Shinichi Kojima ,  Hamada Wahba ,  Michael R. Gluszczak ,  Joseph A. DiRegolo

IPC: H01J37/22 ,  G01N21/64 ,  H01J37/244

CPC classification number: G01N21/64 ,  H01J37/226 ,  H01J37/244 ,  H01J2237/043 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/24578

Abstract: An electron beam detection apparatus includes a first aperture element including a first set of apertures. The apparatus includes a second aperture element including a second set of apertures. The second set of apertures is arranged in a pattern corresponding with the pattern of the first plurality of apertures. The detection apparatus includes an electron-photon conversion element configured to receive electrons of the electron beam transmitted through the first and second aperture elements. The electron-photon conversion element is configured to generate photons in response to the received electrons. The detection apparatus includes an optical assembly including one or more optical elements. The detection apparatus includes a detector assembly. The optical elements of the optical assembly are configured to direct the generated photons from the electron-photon conversion system to the detector assembly.