公开(公告)号：US09996942B2

公开(公告)日：2018-06-12

申请号：US15073617

申请日：2016-03-17

Applicant: KLA-Tencor Corporation

Inventor： Santosh Bhattacharyya ,  Pavan Kumar ,  Lisheng Gao ,  Thirupurasundari Jayaraman ,  Raghav Babulnath ,  Srikanth Kandukuri ,  Gangadharan Sivaraman ,  Karthikeyan Subramanian ,  Raghavan Konuru ,  Rahul Lakhawat

IPC: G06K9/00 ,  G06T7/33

CPC classification number: G06T7/33 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: Methods and systems for determining a position of output generated by an inspection subsystem in design data space are provided. In general, some embodiments described herein are configured for substantially accurately aligning inspection subsystem output generated for a specimen to a design for the specimen despite deformation of the design in the inspection subsystem output. In addition, some embodiments are configured for generating and/or using alignment targets that can be shared across multiple specimens of the same layer and design rule for alignment of inspection subsystem output generated for a specimen to a design for the specimen.

公开(公告)号：US20160275672A1

公开(公告)日：2016-09-22

申请号：US15073617

申请日：2016-03-17

Applicant: KLA-Tencor Corporation

Inventor： Santosh Bhattacharyya ,  Pavan Kumar ,  Lisheng Gao ,  Thirupurasundari Jayaraman ,  Raghav Babulnath ,  Srikanth Kandukuri ,  Gangadharan Sivaraman ,  Karthikeyan Subramanian ,  Raghavan Konuru ,  Rahul Lakhawat

IPC: G06T7/00

CPC classification number: G06T7/33 ,  G06T2207/10061 ,  G06T2207/30148

Abstract: Methods and systems for determining a position of output generated by an inspection subsystem in design data space are provided. In general, some embodiments described herein are configured for substantially accurately aligning inspection subsystem output generated for a specimen to a design for the specimen despite deformation of the design in the inspection subsystem output. In addition, some embodiments are configured for generating and/or using alignment targets that can be shared across multiple specimens of the same layer and design rule for alignment of inspection subsystem output generated for a specimen to a design for the specimen.

Abstract translation: 提供了用于确定由检查子系统在设计数据空间中产生的输出位置的方法和系统。 通常，这里描述的一些实施例被配置成用于将检测子系统产生的样品基本上精确地对准于试样的设计，尽管检查子系统输出中的设计变形。 此外，一些实施例被配置用于生成和/或使用可以在同一层的多个样本上共享的对准目标和用于将为样本生成的检查子系统输出对准样本的设计规则的设计规则。