公开(公告)号：US10468288B2

公开(公告)日：2019-11-05

申请号：US15383207

申请日：2016-12-19

申请人： KLA-Tencor Corporation

发明人： Aviv Balan ,  Luping Huang ,  Savita Chandan ,  Chia-Chu Chen ,  Teck Meriam

IPC分类号： H01L21/683 ,  H01L21/687 ,  H01L21/67

摘要： Methods and systems for vacuum mounting a warped, thin substrate onto a flat chuck are presented herein. A vacuum chuck includes three or more collapsible bellows that move above the chuck and into contact with a warped substrate. The bellows seal and vacuum clamp onto the backside surface of the substrate. In some embodiments, the bellows collapse by at least five hundred micrometers while clamping. An extensible sealing element is mounted in a recessed annular channel on the surface of the chuck body. As the substrate moves toward the chucking surface, the extensible sealing element extends at least five millimeters above the chuck body and into contact with the substrate. As the space between the chuck and the substrate is evacuated, the extensible sealing element collapse into the recessed annular channel, and the substrate is clamped onto the flat chucking surface of chuck body.

公开(公告)号：US20180108559A1

公开(公告)日：2018-04-19

申请号：US15383207

申请日：2016-12-19

申请人： KLA-Tencor Corporation

发明人： Aviv Balan ,  Luping Huang ,  Savita Chandan ,  Chia-Chu Chen ,  Teck Meriam

IPC分类号： H01L21/683 ,  H01L21/687

摘要： Methods and systems for vacuum mounting a warped, thin substrate onto a flat chuck are presented herein. A vacuum chuck includes three or more collapsible bellows that move above the chuck and into contact with a warped substrate. The bellows seal and vacuum clamp onto the backside surface of the substrate. In some embodiments, the bellows collapse by at least five hundred micrometers while clamping. An extensible sealing element is mounted in a recessed annular channel on the surface of the chuck body. As the substrate moves toward the chucking surface, the extensible sealing element extends at least five millimeters above the chuck body and into contact with the substrate. As the space between the chuck and the substrate is evacuated, the extensible sealing element collapse into the recessed annular channel, and the substrate is clamped onto the flat chucking surface of chuck body.