公开(公告)号：US20170336329A1

公开(公告)日：2017-11-23

申请号：US15477885

申请日：2017-04-03

Applicant: KLA-Tencor Corporation

Inventor： Frank Li ,  Zhiwei Xu ,  Timothy Swisher ,  Kwan Auyeung ,  Yury Yuditsky

IPC: G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G02B26/108

Abstract: A system includes a beam steering assembly configured to adjust an incident beam to form a corrected beam; a beam monitoring assembly configured to generate monitoring data for the corrected beam including one or more offset parameters of the corrected beam; and a controller configured to store one or more zero parameters of the corrected beam, calculate at least one difference between the one or more zero parameters and the one or more offset parameters of the corrected beam, determine one or more beam position adjustments of the incident beam based on the at least one difference between the one or more zero parameters and the one or more offset parameters of the corrected beam, and direct the beam steering assembly via one or more motor drivers to actuate one or more motors to adjust the incident beam to form the corrected beam.