公开(公告)号：US10739276B2

公开(公告)日：2020-08-11

申请号：US15828938

申请日：2017-12-01

Applicant: KLA-Tencor Corporation

Inventor： Donald Pettibone ,  Daniel Ivanov Kavaldjiev ,  Chuanyong Huang ,  Qing Li ,  Frank Li ,  Zhiwei Xu

IPC: G01N21/95 ,  G01J1/02 ,  G01J1/04 ,  G01J1/42

Abstract: Stray and air scattered light can be reduced by configuring a size of the collection area of a sensor, which reduces a source of sensitivity-limiting noise in the system. By adjusting a size of the collection area, stray deep ultraviolet light and air-scattered deep ultraviolet light can be reduced. A servo can control a position of an illumination spot that is collected by the time delay and integration sensor.

公开(公告)号：US20200264099A1

公开(公告)日：2020-08-20

申请号：US16279395

申请日：2019-02-19

Applicant: KLA-Tencor Corporation

Inventor： Frank Li ,  Qing Li ,  Zhiwei Xu

IPC: G01N21/47 ,  G01N21/21

Abstract: An inspection system utilizing an air scatter standard includes one or more illumination sources to generate a beam of illumination, illumination optics configured to focus the beam of illumination into a volume of air contained within a chamber of an inspection chamber, one or more collection optics configured to collect a portion of illumination scattered from the volume of air, a detector configured to receive the collected portion of illumination from the one or more collection optics, a controller including one or more processors, communicatively coupled to the detector, configured to execute a set of program instructions to receive one or more signals from the detector and determine a state of the beam of illumination at one or more times based on a comparison between at least one of the intensity or polarization of the illumination scattered from the volume of air and a predetermine air scatter standard.

公开(公告)号：US11016024B2

公开(公告)日：2021-05-25

申请号：US16279395

申请日：2019-02-19

Applicant: KLA-Tencor Corporation

Inventor： Frank Li ,  Qing Li ,  Zhiwei Xu

IPC: G01N21/47 ,  G01N21/21

Abstract: An inspection system utilizing an air scatter standard includes one or more illumination sources to generate a beam of illumination, illumination optics configured to focus the beam of illumination into a volume of air contained within a chamber of an inspection chamber, one or more collection optics configured to collect a portion of illumination scattered from the volume of air, a detector configured to receive the collected portion of illumination from the one or more collection optics, a controller including one or more processors, communicatively coupled to the detector, configured to execute a set of program instructions to receive one or more signals from the detector and determine a state of the beam of illumination at one or more times based on a comparison between at least one of the intensity or polarization of the illumination scattered from the volume of air and a predetermine air scatter standard.

公开(公告)号：US20190137411A1

公开(公告)日：2019-05-09

申请号：US15828938

申请日：2017-12-01

Applicant: KLA-Tencor Corporation

Inventor： Donald Pettibone ,  Daniel Ivanov Kavaldjiev ,  Chuanyong Huang ,  Qing Li ,  Frank Li ,  Zhiwei Xu

IPC: G01N21/95 ,  G01J1/02

Abstract: Stray and air scattered light can be reduced by configuring a size of the collection area of a sensor, which reduces a source of sensitivity-limiting noise in the system. By adjusting a size of the collection area, stray deep ultraviolet light and air-scattered deep ultraviolet light can be reduced. A servo can control a position of an illumination spot that is collected by the time delay and integration sensor.

公开(公告)号：US20170336329A1

公开(公告)日：2017-11-23

申请号：US15477885

申请日：2017-04-03

Applicant: KLA-Tencor Corporation

Inventor： Frank Li ,  Zhiwei Xu ,  Timothy Swisher ,  Kwan Auyeung ,  Yury Yuditsky

IPC: G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/956 ,  G02B26/108

Abstract: A system includes a beam steering assembly configured to adjust an incident beam to form a corrected beam; a beam monitoring assembly configured to generate monitoring data for the corrected beam including one or more offset parameters of the corrected beam; and a controller configured to store one or more zero parameters of the corrected beam, calculate at least one difference between the one or more zero parameters and the one or more offset parameters of the corrected beam, determine one or more beam position adjustments of the incident beam based on the at least one difference between the one or more zero parameters and the one or more offset parameters of the corrected beam, and direct the beam steering assembly via one or more motor drivers to actuate one or more motors to adjust the incident beam to form the corrected beam.