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1.发明申请公开(公告)号：US20200152410A1
公开(公告)日：2020-05-14
申请号：US16663341
申请日：2019-10-25
发明人： Myoung Choul Choi , Boo Ki Min , Sang Ju Lee , Chang Min Choi , Ji Young Baek , Jae yeong Eo , Il Hee Kim
IPC分类号： H01J37/08
摘要： An ion beam generating device includes a liquid metal ion source configured to melt metal and emit an ion beam, and an extractor disposed under the liquid metal ion source and configured to extract the ion beam emitted from the liquid metal ion source. The liquid metal ion source includes a storage configured to accommodate the metal, an emitter configured to receive the metal from the storage and emit the ion beam, and a heater configured to heat the emitter or the storage. The heater is configured to directly heat the metal accommodated in the storage to melt the metal into a liquid state, and an amount of the ion beam to be extracted is controlled by a voltage difference that changes based on a distance between the emitter and the extractor.
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公开(公告)号：US20210090873A1
公开(公告)日：2021-03-25
申请号：US16937862
申请日：2020-07-24
发明人： Ji Young Baek , Myoung Choul Choi , Chang Min Choi , Sang Ju Lee , Boo Ki Min
摘要： A mass spectrometry system includes a sample holder provided in a vacuum changer and on which a sample is disposed, an irradiator configured to perform sputtering or ionization on the sample, an analyzer configured to analyze an ionized sample generated from the sample by the irradiator, and a controller configured to control the irradiator or the analyzer and perform a first process and a second process. The first process is to determine position information of materials in the sample by irradiating a laser or ion beam to a portion of the sample, and the second process is to irradiate a laser or ion beam of a first output value to another portion of the sample in a section in which the materials in the sample change and irradiate a laser or ion beam of a second output value in other sections.
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