公开(公告)号：US10699868B2

公开(公告)日：2020-06-30

申请号：US16185527

申请日：2018-11-09

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Chang Min Choi ,  Myoung Choul Choi ,  Sang Ju Lee ,  Ji Young Baek ,  Jeong Jin Kim

IPC: H01J37/08 ,  G01N29/44 ,  H01J37/244

Abstract: Disclosed is a device for generating an organic molecular cluster ion beam, the device including a receiver configured to accommodate an organic material, a cluster generator configured to generate a cluster by supersonic expanding the organic material accommodated in the receiver at a high speed, a photo-ionizer configured to temporarily accommodate the cluster that is generated through the cluster generator, an ultraviolet (UV) light source configured to irradiate an UV pulse to the photo-ionizer to ionize the cluster, and entrance electrodes disposed at both sides of the photo-ionizer and configured to provide a potential difference to the photo-ionizer to generate a cluster ion beam.

公开(公告)号：US20200152410A1

公开(公告)日：2020-05-14

申请号：US16663341

申请日：2019-10-25

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Myoung Choul Choi ,  Boo Ki Min ,  Sang Ju Lee ,  Chang Min Choi ,  Ji Young Baek ,  Jae yeong Eo ,  Il Hee Kim

IPC: H01J37/08

Abstract: An ion beam generating device includes a liquid metal ion source configured to melt metal and emit an ion beam, and an extractor disposed under the liquid metal ion source and configured to extract the ion beam emitted from the liquid metal ion source. The liquid metal ion source includes a storage configured to accommodate the metal, an emitter configured to receive the metal from the storage and emit the ion beam, and a heater configured to heat the emitter or the storage. The heater is configured to directly heat the metal accommodated in the storage to melt the metal into a liquid state, and an amount of the ion beam to be extracted is controlled by a voltage difference that changes based on a distance between the emitter and the extractor.

公开(公告)号：US20210090873A1

公开(公告)日：2021-03-25

申请号：US16937862

申请日：2020-07-24

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Ji Young Baek ,  Myoung Choul Choi ,  Chang Min Choi ,  Sang Ju Lee ,  Boo Ki Min

IPC: H01J49/16 ,  H01J49/40 ,  H01J49/00

Abstract: A mass spectrometry system includes a sample holder provided in a vacuum changer and on which a sample is disposed, an irradiator configured to perform sputtering or ionization on the sample, an analyzer configured to analyze an ionized sample generated from the sample by the irradiator, and a controller configured to control the irradiator or the analyzer and perform a first process and a second process. The first process is to determine position information of materials in the sample by irradiating a laser or ion beam to a portion of the sample, and the second process is to irradiate a laser or ion beam of a first output value to another portion of the sample in a section in which the materials in the sample change and irradiate a laser or ion beam of a second output value in other sections.