公开(公告)号：US20150316496A1

公开(公告)日：2015-11-05

申请号：US14647772

申请日：2013-11-26

Applicant: KOREA BASIC SCIENCE INSTITUTE

Inventor： Ki Soo Chang ,  Seon Young Ryu ,  Woo June Choi ,  Geon Hee Kim

IPC: G01N25/72

CPC classification number: G01N25/72 ,  H01L22/12

Abstract: The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit.

Abstract translation: 本发明提供一种通过使用热分布测量来分析缺陷的方法，包括：样品加载单元，用于加载样品以通过热分布特性检查是否存在缺陷; 用于将可见光辐射到样品上的光源; 用于产生驱动信号以便周期性地加热样品的电源单元; 用于检测来自所述样品表面的反射光的检测单元; 以及用于使检测单元与电源单元的驱动信号同步的信号发生器。

公开(公告)号：US09933376B2

公开(公告)日：2018-04-03

申请号：US14647772

申请日：2013-11-26

Applicant: Korea Basic Science Institute

Inventor： Ki Soo Chang ,  Seon Young Ryu ,  Woo June Choi ,  Geon Hee Kim

IPC: G01N25/72 ,  H01L21/66

CPC classification number: G01N25/72 ,  H01L22/12

Abstract: The present invention provides a method for analyzing defects by using heat distribution measurement, comprising: a sample loading unit for loading a sample to check whether or not there is a defect through heat distribution characteristics; a light source for radiating visible light onto the sample; a power supply unit for generating a driving signal in order to periodically heat the sample; a detection unit for detecting reflected light from the surface of the sample; and a signal generator for synchronizing the detection unit with the driving signal of the power supply unit.