公开(公告)号：US20140311662A1

公开(公告)日：2014-10-23

申请号：US14194084

申请日：2014-02-28

Applicant: KOREA INSTITUTE OF MACHINERY & MATERIALS

Inventor： Jun-Hyuk CHOI ,  Eung-Sug LEE ,  Ji-Hye LEE ,  Jun-ho JEONG ,  Joo-Yun JUNG ,  Dae-Guen CHOI ,  Cheol-Hyeon KIM

IPC: B32B37/00

CPC classification number: G02B5/008 ,  B32B37/06 ,  B82Y20/00 ,  G09F3/10 ,  Y10T156/1031 ,  Y10T156/1041

Abstract: In a method for fabricating an embedded pattern using a transfer-based imprinting, an adhesive layer is formed on a substrate. The adhesive layer has a photo curable resin. A stamp having a protruded pattern is prepared. A thin-film layer is formed on an outer surface of the protruded pattern of the stamp. The stamp having the thin-film layer contact with the adhesive layer is pressed to selectively transfer the thin-film layer of the protruded pattern to the adhesive layer. Ultraviolet rays (UV) are irradiated to cure the adhesive layer. The stamp is removed.

Abstract translation: 在使用基于转印的压印制造嵌入图案的方法中，在基板上形成粘合剂层。 粘合剂层具有光固化树脂。 准备具有突出图案的印模。 在印模的突出图案的外表面上形成薄膜层。 按压具有与粘合剂层接触的薄膜层的印模以选择性地将突出图案的薄膜层转印到粘合剂层。 照射紫外线（UV）以固化粘合剂层。 邮票被删除。

公开(公告)号：US20130340929A1

公开(公告)日：2013-12-26

申请号：US13726684

申请日：2012-12-26

Applicant: KOREA INSTITUTE OF MACHINERY & MATERIALS

Inventor： Eung-Sug LEE ,  Joo Yun Jung ,  Jun Hyuk Choi ,  Jae Won Hahn

IPC: B32B37/26 ,  G03F7/20

CPC classification number: B32B37/26 ,  B81C99/009 ,  B81C2201/0152 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G03F7/0017 ,  G03F7/2004

Abstract: There is provided a method of manufacturing a stamp for a plasmonic nanolithography apparatus. The method includes forming metal patterns on a substrate, coating a hydrophobic thin film on external surfaces of the metal patterns to hydrophobic processing the external surfaces of the metal patterns, selectively hydrophilic processing only the external surfaces of the metal patterns, laminating a buffer layer on the substrate and the metal patterns, and transcribing the metal patterns and the buffer layer from the substrate to a base formed of light transmission material to be combined with the base.

Abstract translation: 提供了一种制造等离子体激光纳米光刻设备的印模的方法。 该方法包括在基板上形成金属图案，在金属图案的外表面上涂覆疏水性薄膜以对金属图案的外表面进行疏水处理，仅选择亲水处理金属图案的外表面，将缓冲层层压在 基板和金属图案，并且将金属图案和缓冲层从基板转印到由光透射材料形成的基底以与基底结合。